Method of fabricating dielectric mixed layers and capacitive element and use thereof
View Patent ↗The present invention provides a method for fabricating a capacitive element ( 100 ), a substrate ( 101 ) being provided as a first electrode layer of the capacitive element ( 100 ), the substrate ( 101 ) provided as an electrode layer is conditioned, a dielectric layer ( 102 ) is deposited on the conditioned substrate ( 101 ) and a second electrode layer ( 104 ) is applied on the layer stack produced, the layer stack being modified by a heat treatment in such a way that the dielectric layer ( 102 ) deposited on the conditioned substrate ( 101 ) forms a dielectric mixed layer ( 105 ) with a reaction layer ( 103 ) deposited on the dielectric layer ( 102 ), which dielectric mixed layer has an increased dielectric constant (k) or an increased thermal stability.
1. Method for fabricating a capacitive element, comprising the steps of:
a) providing a substrate which serves as a first electrode layer of the capacitive element;
b) conditioning the substrate provided as a first electrode layer;
c) depositing a dielectric layer on the conditioned substrate;
c1) depositing a reaction layer on the dielectric layer;
c2) heat-treating a layer stack formed in steps a), b), c) and c1) in such a way that the dielectric layer deposited on the conditioned substrate reacts with the reaction layer by means of a solid phase reaction so that the dielectric layer and the reaction layer convert into a dielectric mixed layer wherein the heat treatment comprises a reoxidation in an oxygen-containing environment selected from ozone, atomic or molecular oxygen, or oxygen plasma, or a moisture oxidation;
c3) depositing a further dielectric layer on the dielectric mixed layer;
c4) depositing a further reaction layer on the further dielectric layer;
c5) heat-treating a layer stack formed in steps a), b), c1), c2), c3) and c4) in such a way that the further dielectric layer reacts with the further reaction layer by means of a solid phase reaction so that the further dielectric layer and the further reaction layer convert into a further dielectric mixed layer; and
d) depositing a second electrode layer.
2. Method for fabricating a capacitive element, comprising the steps of:
a) providing a substrate which serves as a first electrode layer of the capacitive element;
b) conditioning the substrate provided as a first electrode layer;
c) depositing a dielectric layer on the conditioned substrate
c1) depositing a reaction layer on the dielectric layer;
c2) heat-treating a layer stack formed in steps a), b), c) and c1) in such a way that the dielectric layer deposited on the conditioned substrate reacts with the reaction layer by means of a solid phase reaction so that the dielectric layer and the reaction layer convert into a dielectric mixed layer wherein the heat treatment is carried out in an inert atmosphere;
c3) depositing a further dielectric layer on the dielectric mixed layer;
c4) depositing a further reaction layer on the further dielectric layer;
c5) heat-treating a layer stack formed in steps a), b), c1), c2), c3) and c4) in such a way that the further dielectric layer reacts with the further reaction layer by means of a solid phase reaction so that the further dielectric layer and the further reaction layer convert into a further dielectric mixed layer; and
d) depositing a second electrode layer.