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App. No. 11/153,646 · Confirmation No. 9128

Method and system for inspecting a wafer WITH TELECENTRIC ILLUMINATION

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2009-07-06 ABN Abandonment 2 View
2008-12-19 CTNF Non-Final Rejection 9 View
2008-12-19 SRFW Search information including classification, databases and other search related notes 1 View
2008-12-19 FWCLM Index of Claims 1 View
2008-10-14 WFEE Fee Worksheet (SB06) 2 View
2008-10-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-10-14 WFEE Fee Worksheet (SB06) 1 View
2008-10-14 RCEX Request for Continued Examination (RCE) 1 View
2008-10-14 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2008-10-14 CLM Claims 5 View
2008-10-14 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2008-09-23 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2008-09-23 CTAV Advisory Action (PTOL-303) 3 View
2008-09-15 A.NE Response After Final Action 1 View
2008-09-15 CLM Claims 5 View
2008-09-15 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2008-09-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-07-14 CTFR Final Rejection 9 View
2008-07-14 892 List of references cited by examiner 1 View
2008-07-14 SRFW Search information including classification, databases and other search related notes 1 View
2008-07-14 SRNT Examiner's search strategy and results 2 View
2008-07-14 FWCLM Index of Claims 1 View
2008-07-14 1449 List of References cited by applicant and considered by examiner 1 View
2008-04-28 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-04-28 TRAN.LET Transmittal Letter 4 View
2008-04-28 FOR Foreign Reference 21 View
2008-04-28 FOR Foreign Reference 15 View
2008-04-28 FOR Foreign Reference 11 View
2008-04-28 FOR Foreign Reference 17 View
2008-04-28 WFEE Fee Worksheet (SB06) 2 View
2008-04-28 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-04-25 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-04-25 SPEC Specification 1 View
2008-04-25 CLM Claims 5 View
2008-04-25 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2008-04-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-04-25 WFEE Fee Worksheet (SB06) 1 View
2008-01-25 CTNF Non-Final Rejection 9 View
2008-01-25 1449 List of References cited by applicant and considered by examiner 1 View
2008-01-25 892 List of references cited by examiner 1 View
2008-01-25 SRFW Search information including classification, databases and other search related notes 1 View
2008-01-25 FWCLM Index of Claims 1 View
2008-01-25 BIB Bibliographic Data Sheet 1 View
2008-01-21 SRNT Examiner's search strategy and results 6 View
2006-12-27 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2006-12-19 PA.. Power of Attorney 2 View
2006-12-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2005-06-15 TRNA Transmittal of New Application 3 View
2005-06-15 SPEC Specification 16 View
2005-06-15 CLM Claims 4 View
2005-06-15 ABST Abstract 1 View
2005-06-15 DRW Drawings-only black and white line drawings 4 View
2005-06-15 OATH Oath or Declaration filed 1 View
2005-06-15 WFEE Fee Worksheet (SB06) 1 View
2005-06-15 WFEE Fee Worksheet (SB06) 1 View
2005-06-15 ADS Application Data Sheet 2 View
2005-06-15 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-06-15 FRPR Certified Copy of Foreign Priority Application 31 View
2005-06-15 136A Authorization for Extension of Time all replies 3 View
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Quick Facts
App. No.
11/153,646
Filed
2005-06-15
Pub. No.
US20050280808A1
Art Unit
2886