IP Library Granted Patent US 7,554,052
Granted Patent B2
US 7,554,052 · App. 11/192,600 · Granted Jun 30, 2009

Method and apparatus for the application of twin wire arc spray coatings

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Quick Facts
Patent No.
US 7,554,052
App. No.
11/192,600
Granted
Jun 30, 2009
Kind
B2
Abstract

Methods and apparatuses are disclosed for applying a twin wire arc spray composite coating to achieve surface effects on a substrate having predetermined characteristics.

Claims (11)

1. A method for coating a processing chamber component substrate surface comprising the steps of:

providing a processing chamber component substrate having a substrate surface;

providing a twin wire arc spray coating apparatus for applying coatings; and

applying a composite twin wire arc spray coating to the substrate surface, said composite twin wire arc spray coating comprising a first bond coating having an average surface roughness value from about 10 to about 20 microns on the substrate surface, and a second top coating having an average surface roughness value from about 17 to about 23 microns on the first bond coating, such that the second top coating has an average surface roughness value that is greater than the first bond coating average surface roughness value.

2. The method of claim 1 , wherein the substrate surface is made from a material comprising a metallic substrate.

3. The method of claim 2 , wherein the metallic substrate comprises a metal selected from the group consisting of stainless steel-containing alloys, aluminum and aluminum-containing alloys.

4. The method of claim 1 , wherein the substrate surface is made from a material comprising a non-metallic substrate.

5. The method of claim 4 , wherein the non-metallic substrate comprises a ceramic-containing compound.

6. The method of claim 1 , wherein the composite twin wire arc spray coating comprises a metal selected from the group consisting of aluminum, nickel, aluminum alloys and molybdenum.

7. The method of claim 1 , wherein the composite twin wire arc spray coating provides a substantially continuous coating to the substrate surface.

8. The method of claim 1 , wherein the composite twin wire arc spray coating has a bond strength of from about 40 mPa to about 77 mPa.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Aug 28, 2018
From: UNIVEST BANK AND TRUST CO., SUCCESSOR BY MERGER TO FOX CHASE BANK
To: QUANTUM GLOBAL TECHNOLOGIES, LLC
Reel/Frame 046962/0614 →
SECURITY INTEREST Recorded Aug 27, 2018
From: ULTRA CLEAN HOLDINGS, INC.; UCT THERMAL SOLUTIONS, INC.; ULTRA CLEAN TECHNOLOGY SYSTEMS AND SERVICE, INC.; QUANTUM GLOBAL TECHNOLOGIES, LLC
To: BARCLAYS BANK PLC, AS ADMINISTRATIVE AGENT
Reel/Frame 048175/0960 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 12, 2011
From: APPLIED MATERIALS, INC.
To: QUANTUM GLOBAL TECHNOLOGIES LLC
Reel/Frame 026886/0171 →
SECURITY AGREEMENT Recorded Jun 21, 2011
From: QUANTUM GLOBAL TECHNOLOGIES, LLC
To: FOX CHASE BANK
Reel/Frame 026468/0130 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 10, 2008
From: BOC EDWARDS, INC.
To: APPLIED MATERIALS, INC.
Reel/Frame 020365/0942 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 30, 2007
From: THE BOC GROUP, INC.
To: BOC EDWARDS, INC.
Reel/Frame 019767/0251 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 29, 2005
From: DEEM, JOHN GILBERT; COYNE, ROBERT MANUEL
To: THE BOC GROUP, INC.
Reel/Frame 016830/0193 →