Patent Assignment
Reel/Frame 026886/0171
Assignment of Assignor's Interest
Recorded: 2011-09-12
Pages: 12
Assignor
APPLIED MATERIALS, INC.
Executed: 2011-05-12
Assignee
QUANTUM GLOBAL TECHNOLOGIES LLC
123 N. MAIN STREET, DUBLIN, PENNSYLVANIA, 18917
Covered Properties
(24)
Methods for Cleaning Process Kits and Chambers, and for Ruthenium Recovery
PCT:
PCT/US2008/087551 ↗
Method and Apparatus for Showerhead Cleaning
PCT:
PCT/US2010/048732 ↗
Method of Removing Sputter Deposition from Components of Vacuum Deposition Equipment
Patent:
5,660,640 →
Application:
08/491,154 →
Apparatus and Method for the Immersion Cleaning and Transport of Semiconductor Components
Patent:
5,651,797 →
Application:
08/511,975 →
Method for Cleaning Semiconductor Fabrication Equipment Parts
Method of Cleaning a Coated Process Chamber Component
Cleaning Process and Apparatus for Silicate Materials
Ultrasonic Assisted Etch Using Corrosive Liquids
Method for Removing a Composite Coating Containing Tantalum Deposition and Arc Sprayed Aluminum from Ceramic Substrates
Cleaning Processes for Silicon Carbide Materials
Patent:
7,754,609 →
Application:
10/696,394 →
Cleaning Chamber Surfaces to Recover Metal-Containing Compounds
Process for producing semi-conductor coated substrate
Application:
10/807,716 →
Publication:
US 2005/0215059
Textured Chamber Surface
Electrochemical Removal of Tantalum-Containing Materials
Patent:
7,964,085 →
Application:
10/870,716 →
Cleaning Process and Apparatus for Silicate Materials
Method and Apparatus for the Application of Twin Wire Arc Spray Coatings
Apparatus and methods for slurry cleaning of etch chambers
Application:
11/272,844 →
Publication:
US 2007/0111642
System and method for cleaning semiconductor fabrication equipment parts
Application:
11/400,125 →
Publication:
US 2006/0180180
Ultrasonic Assisted Etch Using Corrosive Liquids
Methods and Apparatus for Cleaning Chamber Components
Methods and Apparatus for Cleaning Deposition Chamber Parts Using Selective Spray Etch
Application:
12/146,676 →
Publication:
US 2009/0000641
Methods and Apparatus for Ex Situ Seasoning of Electronic Device Manufacturing Process Components
Methods for Cleaning Process Kits and Chambers, and for Ruthenium Recovery
Method and Apparatus for Showerhead Cleaning
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 16, 1995
From: LAUBE, DAVID P.
To: JORAY CORPORATION
Reel/Frame 007569/0695 →
Assignment of Assignor's Interest
Aug 7, 1995
From: LAUBE, DAVID P.
To: JORAY CORPORATION
Reel/Frame 007623/0894 →
Assignment of Assignor's Interest
Oct 22, 1999
From: JORAY CORPORATION, AN ARIZONA CORPORATION
To: JORAY CORPORATION
Reel/Frame 010321/0503 →
Assignment of Assignor's Interest
Jan 7, 2002
From: TAN, SAMANTHA
To: CHEMTRACE CORPORATION
Reel/Frame 012444/0820 →
Assignment of Assignor's Interest
Apr 7, 2003
From: WANG, HONG; HE, YONGXIANG; STOW, CLIFFORD C.
To: APPLIED MATERIALS, INC.
Reel/Frame 013568/0798 →
Assignment of Assignor's Interest
Dec 29, 2003
From: TAN, SAMANTHA; CHEN, NING
To: CHEMTRACE CORPORATION
Reel/Frame 014838/0343 →
Assignment of Assignor's Interest
Feb 2, 2004
From: TAN, SAMANTHA; CHEN, NING
To: CHEMTRACE CORPORATION
Reel/Frame 014936/0127 →
Assignment of Assignor's Interest
Mar 29, 2004
From: TAN, SAMANTHA S.H.
To: CHEMTRACE CORPORATION
Reel/Frame 015157/0518 →
Assignment of Assignor's Interest
Apr 5, 2004
From: BURGESS, REGINALD RONALD; DAVIS, IAN MARTIN
To: BOC GROUP, INC., THE
Reel/Frame 015175/0369 →
Assignment of Assignor's Interest
May 10, 2004
From: BRUECKNER, KARL; WANG, HONG
To: APPLIED MATERIALS, INC.
Reel/Frame 015313/0655 →
Assignment of Assignor's Interest
Jun 7, 2004
From: BRUECKNER, KARL; WANG, HONG; WEST, BRIAN
To: APPLIED MATERIALS, INC.
Reel/Frame 015455/0413 →
Assignment of Assignor's Interest
Aug 4, 2004
From: DAVIS, IAN M.; LAUBE, DAVID P.
To: BOC GROUP, INC., THE
Reel/Frame 015644/0409 →
Assignment of Assignor's Interest
Sep 14, 2004
From: WANG, HONG; TSAI, KENNETH
To: APPLIED MATERIALS, INC.
Reel/Frame 015138/0899 →
Reassignment
Oct 19, 2004
From: CHEM TRACE CORPORATION
To: CHEM TRACE PRECISION CLEANING, INC.
Reel/Frame 015283/0261 →
Reassignment
Oct 19, 2004
From: CHEMTRACE CORPORATION
To: CHEMTRACE PRECISION CLEANING, INC.
Reel/Frame 015260/0181 →
Assignment of Assignor's Interest
Oct 19, 2004
From: CHEMTRACE CORPORATION
To: CHEMTRACE PRECISION CLEANING, INC.
Reel/Frame 015260/0197 →
Reassignment
Oct 19, 2004
From: CHEM TRACE CORPORATION
To: CHEM TRACE PRECISION CLEANING, INC.
Reel/Frame 015260/0174 →
Assignment of Assignor's Interest
Jul 29, 2005
From: DEEM, JOHN GILBERT; COYNE, ROBERT MANUEL
To: THE BOC GROUP, INC.
Reel/Frame 016830/0193 →
Assignment of Assignor's Interest
Sep 22, 2005
From: JORAY CORPORATION
To: BOC GROUP, INC., THE
Reel/Frame 016835/0435 →
Assignment of Assignor's Interest
Sep 22, 2005
From: JORAY CORPORATION
To: THE BOC GROUP, INC.
Reel/Frame 016835/0432 →
Assignment of Assignor's Interest
Feb 2, 2006
From: DAVIS, IAN MARTIN; LAUBE, DAVID P.
To: THE BOC GROUP, INC.
Reel/Frame 017110/0723 →
Assignment of Assignor's Interest
Aug 30, 2007
From: THE BOC GROUP, INC.
To: BOC EDWARDS, INC.
Reel/Frame 019767/0251 →
Assignment of Assignor's Interest
Dec 19, 2007
From: RABINOVICH, FELIX; ECHOLS, THOMAS; MALESKI, JANET; CHEN, NING
To: APPLIED MATERIALS, INC.
Reel/Frame 020274/0194 →
Assignment of Assignor's Interest
Jan 10, 2008
From: BOC EDWARDS, INC.
To: APPLIED MATERIALS, INC.
Reel/Frame 020365/0966 →
Assignment of Assignor's Interest
Jan 10, 2008
From: BOC EDWARDS, INC.
To: APPLIED MATERIALS, INC.
Reel/Frame 020362/0576 →