IP Library Granted Patent US 6,810,887
Granted Patent Utility
US 6,810,887 · Confirmation No. 5302

METHOD FOR CLEANING SEMICONDUCTOR FABRICATION EQUIPMENT PARTS

Inventor: Samantha Tan
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Code Description Pages PDF
2011-12-01 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-12-01 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-11-14 PA.. Power of Attorney 1 View
2011-11-14 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2011-11-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-07-12 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2006-06-22 PA.. Power of Attorney 1 View
2004-09-23 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-09-23 LET. Miscellaneous Incoming Letter 2 View
2004-09-23 DRW Drawings-only black and white line drawings 9 View
2004-07-09 LET. Miscellaneous Incoming Letter 5 View
2004-06-18 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-18 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2004-06-18 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-06-18 1449 List of References cited by applicant and considered by examiner 1 View
2004-06-18 892 List of references cited by examiner 1 View
2004-06-18 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-18 FWCLM Index of Claims 2 View
2004-06-18 WFEE Fee Worksheet (SB06) 1 View
2004-06-18 SRFW Search information including classification, databases and other search related notes 1 View
2004-06-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-06-08 SPEC Specification 1 View
2004-06-08 CLM Claims 6 View
2004-06-08 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-06-08 LET. Miscellaneous Incoming Letter 5 View
2004-06-07 SRNT Examiner's search strategy and results 4 View
2004-05-26 ELC. Response to Election / Restriction Filed 3 View
2004-04-21 CTRS Requirement for Restriction/Election 7 View
2004-04-21 FWCLM Index of Claims 1 View
2004-03-11 SRNT Examiner's search strategy and results 12 View
2003-11-18 OATH Oath or Declaration filed 2 View
2003-11-18 DRW Drawings-only black and white line drawings 9 View
2003-06-02 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-06-06 SRNT Examiner's search strategy and results 4 View
2002-01-15 PEFN Pre-Exam Formalities Notice 1 View
2002-01-07 OATH Oath or Declaration filed 2 View
2001-09-17 PEFN Pre-Exam Formalities Notice 2 View
2001-08-10 TRNA Transmittal of New Application 2 View
2001-08-10 SPEC Specification 25 View
2001-08-10 CLM Claims 6 View
2001-08-10 ABST Abstract 1 View
2001-08-10 DRW Drawings-only black and white line drawings 9 View
2001-08-10 OATH Oath or Declaration filed 2 View
2001-08-10 WFEE Fee Worksheet (SB06) 1 View
2001-08-10 WFEE Fee Worksheet (SB06) 1 View
1999-10-02 SRNT Examiner's search strategy and results 2 View
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Quick Facts
Patent No.
US 6,810,887
App. No.
09/927,263
Filed
2001-08-10
Granted
2004-11-02
Pub. No.
US20040045574A1
Art Unit
1746
PTA
-851 days