Granted Patent
Utility
US 6,810,887
· Confirmation No. 5302
METHOD FOR CLEANING SEMICONDUCTOR FABRICATION EQUIPMENT PARTS
Inventor:
Samantha Tan
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-12-01 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2011-12-01 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2011-11-14 | PA.. |
Power of Attorney | 1 | View | |
| 2011-11-14 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 2 | View | |
| 2011-11-14 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2006-07-12 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 2 | View | |
| 2006-06-22 | PA.. |
Power of Attorney | 1 | View | |
| 2004-09-23 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-09-23 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2004-09-23 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2004-07-09 | LET. |
Miscellaneous Incoming Letter | 5 | View | |
| 2004-06-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 6 | View | |
| 2004-06-18 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 2 | View | |
| 2004-06-18 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2004-06-18 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-06-18 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-06-18 | FWCLM |
Index of Claims | 2 | View | |
| 2004-06-18 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-06-18 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-06-08 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-06-08 | SPEC |
Specification | 1 | View | |
| 2004-06-08 | CLM |
Claims | 6 | View | |
| 2004-06-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2004-06-08 | LET. |
Miscellaneous Incoming Letter | 5 | View | |
| 2004-06-07 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2004-05-26 | ELC. |
Response to Election / Restriction Filed | 3 | View | |
| 2004-04-21 | CTRS |
Requirement for Restriction/Election | 7 | View | |
| 2004-04-21 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-11 | SRNT |
Examiner's search strategy and results | 12 | View | |
| 2003-11-18 | OATH |
Oath or Declaration filed | 2 | View | |
| 2003-11-18 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2003-06-02 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2002-06-06 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2002-01-15 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2002-01-07 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-09-17 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2001-08-10 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-08-10 | SPEC |
Specification | 25 | View | |
| 2001-08-10 | CLM |
Claims | 6 | View | |
| 2001-08-10 | ABST |
Abstract | 1 | View | |
| 2001-08-10 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2001-08-10 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-08-10 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-08-10 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 1999-10-02 | SRNT |
Examiner's search strategy and results | 2 | View |
Inventors
Samantha Tan
Union City, CA
Attorneys & Agents of Record
Classification
USPC
134/1.3
B08B3/00
B44C1/22
Y10T436/12
C11D2111/22
H10P72/0604
B08B3/08
B08B3/12
B44C1/227
C11D3/3947
C11D7/08
C23C16/4407
Y10S134/902
Prosecution
- Examiner
- EL ARINI, ZEINAB
- Art Unit
- 1746
- Customer No.
- 29880
- Docket No.
- 069918.00105
- Confirmation No.
- 5302
Publication
- Pub. No.
- US20040045574A1
- Pub. Date
- 2004-03-11
Patent Term Adjustment
-851days
Parent
Claims priority from a provisional application
→
App. 60/224,582
Filed 2000-08-11
· Provisional Application Expired
Child
is a Division of
→
App. 10/962,359
Filed 2004-10-08
· Abandoned -- Failure to Respond to an Office Action
Child
is a Division of
→
App. 16/126,086
Filed 2018-09-10
· Abandoned -- Incomplete Application (Pre-examination)
Child
is a Division of
→
App. 11/400,125
Filed 2006-04-07
· Abandoned -- After Examiner's Answer or Board of Appeals Decision
Child
is a Division of
→
App. 13/457,750
Filed 2012-04-27
· Abandoned -- Failure to Respond to an Office Action
Child
is a Division of
→
App. 15/257,492
Filed 2016-09-06
· Abandoned -- Failure to Respond to an Office Action
Child
is a Division of
→
App. 14/209,289
Filed 2014-03-13
· Abandoned -- Failure to Respond to an Office Action
Child
is a Division of
→
App. 15/000,586
Filed 2016-01-19
· Abandoned -- Incomplete Application (Pre-examination)
Child
is a Division of
→
App. 10/961,572
Filed 2004-10-08
· Abandoned -- Failure to Respond to an Office Action
RELEASE OF SECURITY INTEREST
Recorded 2018-08-28
from
QUANTUM GLOBAL TECHNOLOGIES, LLC,
UCT THERMAL SOLUTIONS, INC.,
ULTRA CLEAN HOLDINGS, INC.,
ULTRA CLEAN TECHNOLOGY SYSTEMS AND SERVICE, INC.
SECURITY INTEREST
Recorded 2018-08-27
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-09-12
MERGER
Recorded 2010-05-12
MERGER
Recorded 2010-05-12
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Quick Facts
- Patent No.
- US 6,810,887
- App. No.
- 09/927,263
- Filed
- 2001-08-10
- Granted
- 2004-11-02
- Pub. No.
- US20040045574A1
- Examiner
- EL ARINI, ZEINAB
- Art Unit
- 1746
- PTA
- -851 days
External Links