Patent Application
Utility
App. No. 15/000,586
· Confirmation No. 2279
System and Method for Cleaning Semiconductor Fabrication Equipment Parts
Inventor:
Samantha Tan
Applicant:
QUANTUM GLOBAL TECHNOLOGIES LLC
Abandoned -- Incomplete Application (Pre-examination)
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2016-10-06 | ABN |
Abandonment | 2 | View | |
| 2016-09-06 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-09-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-02-05 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-02-05 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2016-02-05 | NTC.MISS.PRT |
Notice to File Missing Parts | 2 | View | |
| 2016-01-19 | ADS |
Application Data Sheet | 7 | View | |
| 2016-01-19 | SPEC |
Specification | 26 | View | |
| 2016-01-19 | CLM |
Claims | 1 | View | |
| 2016-01-19 | ABST |
Abstract | 1 | View | |
| 2016-01-19 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2016-01-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Samantha Tan
Union City, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29880
- Docket No.
- 069918.00187
- Confirmation No.
- 2279
Parent
is a Continuation of
→
App. 14/209,289
Filed 2014-03-13
· Abandoned -- Failure to Respond to an Office Action
Parent
is a Division of
→
App. 13/457,750
Filed 2012-04-27
· Abandoned -- Failure to Respond to an Office Action
Parent
is a Division of
→
App. 11/400,125
Filed 2006-04-07
· Abandoned -- After Examiner's Answer or Board of Appeals Decision
Parent
is a Division of
→
App. 10/962,359
Filed 2004-10-08
· Abandoned -- Failure to Respond to an Office Action
Parent
is a Division of
→
App. 09/927,263
· US 6,810,887
Filed 2001-08-10
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/224,582
Filed 2000-08-11
· Provisional Application Expired
Child
is a Continuation of
→
App. 15/257,492
Filed 2016-09-06
· Abandoned -- Failure to Respond to an Office Action
Child
is a Continuation of
→
App. 16/126,086
Filed 2018-09-10
· Abandoned -- Incomplete Application (Pre-examination)
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 15/000,586
- Filed
- 2016-01-19
External Links