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App. No. 11/272,844 · Confirmation No. 3903

Apparatus and methods for slurry cleaning of etch chambers

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2014-04-21 ABN Abandonment 2 View
2013-09-20 CTFR Final Rejection 7 View
2013-09-20 1449 List of References cited by applicant and considered by examiner 2 View
2013-09-20 1449 List of References cited by applicant and considered by examiner 2 View
2013-09-20 SRNT Examiner's search strategy and results 1 View
2013-09-20 FWCLM Index of Claims 2 View
2013-09-20 SRFW Search information including classification, databases and other search related notes 1 View
2013-05-07 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2013-05-07 FOR Foreign Reference 2 View
2013-05-07 FOR Foreign Reference 2 View
2013-05-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-05-07 TRAN.LET Transmittal Letter 5 View
2012-02-15 WFEE Fee Worksheet (SB06) 2 View
2012-02-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-02-15 RCEX Request for Continued Examination (RCE) 3 View
2012-02-15 XT/ Extension of Time 1 View
2012-02-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-02-15 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2012-02-15 CLM Claims 4 View
2012-02-15 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2012-02-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-02-15 WFEE Fee Worksheet (SB06) 1 View
2011-12-08 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2011-12-08 FOR Foreign Reference 4 View
2011-12-08 FOR Foreign Reference 22 View
2011-12-08 WFEE Fee Worksheet (SB06) 2 View
2011-12-08 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-12-08 TRAN.LET Transmittal Letter 5 View
2011-10-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-10-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-09-26 PA.. Power of Attorney 1 View
2011-09-26 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2011-09-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-07-15 N/AP Notice of Appeal Filed 1 View
2011-07-15 WFEE Fee Worksheet (SB06) 2 View
2011-07-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-07-15 XT/ Extension of Time 1 View
2011-01-20 CTNF Non-Final Rejection 7 View
2011-01-20 FWCLM Index of Claims 2 View
2011-01-20 SRFW Search information including classification, databases and other search related notes 1 View
2010-11-19 RCEX Request for Continued Examination (RCE) 1 View
2010-11-19 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2010-11-19 CLM Claims 4 View
2010-11-19 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2010-11-19 XT/ Extension of Time 1 View
2010-11-19 WFEE Fee Worksheet (SB06) 2 View
2010-11-19 N417 Electronic Filing System Acknowledgment Receipt 3 View
2010-11-19 WFEE Fee Worksheet (SB06) 1 View
2010-10-04 CTAV Advisory Action (PTOL-303) 3 View
2010-10-04 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2010-09-20 A.NE Response After Final Action 1 View
2010-09-20 CLM Claims 3 View
2010-09-20 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2010-09-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-09-20 WFEE Fee Worksheet (SB06) 1 View
2010-07-19 CTNF Non-Final Rejection 7 View
2010-07-19 SRNT Examiner's search strategy and results 1 View
2010-07-19 SRFW Search information including classification, databases and other search related notes 1 View
2010-07-19 FWCLM Index of Claims 2 View
2010-05-17 RCEX Request for Continued Examination (RCE) 1 View
2010-05-17 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2010-05-17 CLM Claims 3 View
2010-05-17 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2010-05-17 WFEE Fee Worksheet (SB06) 2 View
2010-05-17 N417 Electronic Filing System Acknowledgment Receipt 3 View
2010-05-17 WFEE Fee Worksheet (SB06) 1 View
2010-05-17 WFEE Fee Worksheet (SB06) 1 View
2010-02-18 CTFR Final Rejection 7 View
2010-02-18 FWCLM Index of Claims 1 View
2010-02-18 SRFW Search information including classification, databases and other search related notes 1 View
2010-02-18 SRNT Examiner's search strategy and results 1 View
2010-02-18 SRNT Examiner's search strategy and results 1 View
2009-12-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2009-12-01 CLM Claims 2 View
2009-12-01 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2009-12-01 XT/ Extension of Time 1 View
2009-12-01 LET. Miscellaneous Incoming Letter 1 View
2009-12-01 WFEE Fee Worksheet (SB06) 2 View
2009-12-01 N417 Electronic Filing System Acknowledgment Receipt 3 View
2009-12-01 WFEE Fee Worksheet (SB06) 1 View
2009-11-09 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2009-08-05 CTNF Non-Final Rejection 7 View
2009-08-05 FWCLM Index of Claims 1 View
2009-08-05 SRFW Search information including classification, databases and other search related notes 1 View
2009-08-05 1449 List of References cited by applicant and considered by examiner 2 View
2009-05-19 RCEX Request for Continued Examination (RCE) 1 View
2009-05-19 TRAN.LET Transmittal Letter 2 View
2009-05-19 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2009-05-19 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2009-05-19 CLM Claims 4 View
2009-05-19 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2009-05-19 WFEE Fee Worksheet (SB06) 2 View
2009-05-19 N417 Electronic Filing System Acknowledgment Receipt 3 View
2009-05-19 WFEE Fee Worksheet (SB06) 1 View
2009-02-19 CTFR Final Rejection 7 View
2009-02-19 FWCLM Index of Claims 1 View
2009-02-19 SRFW Search information including classification, databases and other search related notes 1 View
2008-12-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-12-08 CLM Claims 4 View
2008-12-08 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2008-12-08 XT/ Extension of Time 1 View
2008-12-08 WFEE Fee Worksheet (SB06) 2 View
2008-12-08 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-12-08 WFEE Fee Worksheet (SB06) 1 View
2008-08-07 CTNF Non-Final Rejection 7 View
2008-08-07 FWCLM Index of Claims 1 View
2008-08-07 SRFW Search information including classification, databases and other search related notes 1 View
2008-05-21 RCEX Request for Continued Examination (RCE) 1 View
2008-05-21 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2008-05-21 CLM Claims 4 View
2008-05-21 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2008-05-21 PA.. Power of Attorney 1 View
2008-05-21 WFEE Fee Worksheet (SB06) 1 View
2008-04-08 CTFR Final Rejection 7 View
2008-04-08 FWCLM Index of Claims 1 View
2008-04-08 SRFW Search information including classification, databases and other search related notes 1 View
2008-02-01 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-02-01 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-01-24 PA.. Power of Attorney 3 View
2008-01-24 LET. Miscellaneous Incoming Letter 1 View
2008-01-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-01-07 CLM Claims 4 View
2008-01-07 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2008-01-07 C.AD Change of Address 1 View
2008-01-07 LET. Miscellaneous Incoming Letter 2 View
2007-10-04 CTNF Non-Final Rejection 6 View
2007-10-04 1449 List of References cited by applicant and considered by examiner 2 View
2007-10-04 892 List of references cited by examiner 1 View
2007-10-04 FWCLM Index of Claims 1 View
2007-10-04 SRFW Search information including classification, databases and other search related notes 1 View
2007-08-13 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2007-08-13 FOR Foreign Reference 3 View
2007-08-13 FOR Foreign Reference 19 View
2007-08-13 RCEX Request for Continued Examination (RCE) 1 View
2007-08-13 XT/ Extension of Time 1 View
2007-08-07 CTAV Advisory Action (PTOL-303) 3 View
2007-08-07 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2007-07-20 A.NE Response After Final Action 1 View
2007-07-20 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2007-07-20 LET. Miscellaneous Incoming Letter 1 View
2007-07-20 XT/ Extension of Time 1 View
2007-07-20 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2007-05-17 NTC.PUB Notice of Publication 1 View
2007-02-21 CTFR Final Rejection 7 View
2007-02-21 SRFW Search information including classification, databases and other search related notes 1 View
2007-02-21 FWCLM Index of Claims 1 View
2007-01-03 WFEE Fee Worksheet (SB06) 1 View
2006-12-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-12-13 CLM Claims 3 View
2006-12-13 SPEC Specification 1 View
2006-12-13 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2006-12-13 DRW Drawings-only black and white line drawings 1 View
2006-12-13 XT/ Extension of Time 1 View
2006-12-13 LET. Miscellaneous Incoming Letter 1 View
2006-08-11 CTNF Non-Final Rejection 7 View
2006-08-11 1449 List of References cited by applicant and considered by examiner 1 View
2006-08-11 892 List of references cited by examiner 1 View
2006-08-11 FOR Foreign Reference 15 View
2006-08-11 FWCLM Index of Claims 1 View
2006-08-11 SRFW Search information including classification, databases and other search related notes 1 View
2006-02-06 PEFR Applicant Response to Pre-Exam Formalities Notice 4 View
2006-02-06 OATH Oath or Declaration filed 3 View
2005-12-15 PEFN Pre-Exam Formalities Notice 2 View
2005-12-01 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2005-11-14 TRNA Transmittal of New Application 2 View
2005-11-14 SPEC Specification 13 View
2005-11-14 CLM Claims 3 View
2005-11-14 ABST Abstract 1 View
2005-11-14 DRW Drawings-only black and white line drawings 1 View
2005-11-14 WFEE Fee Worksheet (SB06) 1 View
2005-11-14 WFEE Fee Worksheet (SB06) 1 View
2005-11-14 ADS Application Data Sheet 2 View
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Quick Facts
App. No.
11/272,844
Filed
2005-11-14
Pub. No.
US20070111642A1
Art Unit
3727