Granted Patent B2

US 7,842,618 · App. 11/193,409 · Granted Nov 30, 2010

Abstract

Claims (50)

1. A method for forming a memory device, the method comprising:

forming a nitride layer over a substrate;

forming a first trench by etching the nitride layer and the substrate;

trimming the nitride layer on opposite sides of the first trench, where the trimming widens the trench within the nitride layer;

depositing a photoresist material over the nitride layer after trimming the nitride layer, where the depositing includes filling the first trench with the photoresist material;

forming a second trench by further etching the nitride layer and the substrate; and

filling the first trench and the second trench with an oxide material.

2. The method of claim 1 , where trimming the nitride layer further comprises:

removing between 100 Å and 350 Å of nitride from each side of the trench.

3. The method of claim 1 , where trimming the nitride layer on opposite sides of the trench comprises phosphoric acid wet etching the nitride layer on opposite sides of the trench.

4. The method of claim 1 , where filling the trench with an oxide material comprises depositing the oxide material using high density plasma chemical vapor deposition.

5. The method of claim 1 , comprising:

forming a mesa from the oxide material above the trench by stripping the nitride layer;

cleaning the memory device;

forming a tunnel oxide over the substrate; and

forming a floating gate over the tunnel oxide.

6. The method of claim 5 , where a width of the mesa following cleaning of the memory device is approximately 35 nm.

7. The method of claim 1 , comprising:

forming a core trench by etching the nitride layer and the substrate;

forming a periphery trench by etching the nitride layer and the substrate;

widening each of the core and periphery trenches within the nitride layer by trimming the nitride layer on opposite sides of each of the core trench and the periphery trench; and

filling the core and periphery trenches with the oxide material.

8. The method of claim 1 , comprising:

forming a core trench by etching the nitride layer and the substrate;

widening the core trench within the nitride layer by trimming the nitride layer on opposite sides of the core trench;

forming a first liner oxide on an inner surface of the core trench;

forming a periphery trench by etching the nitride layer and the substrate;

forming a second liner oxide on an inner surface of the first liner oxide and the periphery trench; and

filling the core and periphery trenches with the oxide material.

9. The method of claim 1 , comprising:

forming a core trench by etching the nitride layer and the substrate;

forming a first liner oxide on an inner surface of the core trench;

forming a periphery trench by etching the nitride layer and the substrate;

widening the core and periphery trenches within the nitride layer by trimming the nitride layer on opposite sides of each of the core and periphery trenches;

forming a second liner oxide on an inner surface of the first liner oxide and the periphery trench; and

filling the core and periphery trenches with the oxide material.

10. A method comprising:

forming a first trench in a nitride layer of a semiconductor device;

widening the first trench by trimming the nitride layer;

forming a second trench in the semiconductor device after forming the first trench; and

filling the widened first trench and the second trench with an oxide material without widening the second trench by trimming the nitride layer.

11. The method of claim 10 , where forming the first trench comprises etching the nitride layer and a substrate of the semiconductor device.

12. The method of claim 10 , where forming the second trench comprises depositing a photoresist material on the semiconductor device.

13. The method of claim 12 , where depositing the photoresist material on the semiconductor device comprises filling the widened first trench with the photoresist material.

14. The method of claim 10 , where the trimming the nitride layer forms a mesa, the method further comprising:

cleaning the semiconductor device, where the width of the mesa following cleaning of the memory device is approximately 35 nm.

15. The method of claim 10 , further comprising forming a liner oxide on an inner surface of the first trench and on an inner surface of the second trench, where the oxide material is filled over the liner oxide.

16. The method of claim 10 , where trimming the nitride layer comprises:

removing between 100 Å and 350 Å of nitride from a side of the first trench.

17. The method of claim 10 , where forming the first trench by trimming the nitride layer comprises phosphoric wet etching the nitride layer.

Assignments (8)