Lead frame for semiconductor package
View Patent ↗A lead frame for a semiconductor package having not only high molding resin adhesiveness and a low delamination problem under a severe moisture absorbing atmosphere but also high interface adhesiveness and solder wettability of an Au wire, and a method of manufacturing the lead frame are provided. The lead frame includes a base metal layer formed of a metal and a plurality of plating layers having different components formed on at least a surface of the base metal layer, wherein the plating layers include, a Ni plating layer deposited on at least a surface of the base metal layer and formed of Ni or an Ni alloy, a Pd plating layer stacked on at least a surface of the Ni plating layer and formed of Pd or a Pd alloy, and a protection plating layer stacked on at least a surface of the Pd plating layer and formed of Au or an Au alloy, wherein the Ni plating layer is formed to have a predetermined a thickness and a surface coarseness.
1. A lead frame for a semiconductor package comprising:
a base metal layer;
a first Ni plating layer on the base metal layer, the first Ni plating layer having a first thickness and a first surface coarseness;
a second Ni plating layer on the first Ni plating layer, the second Ni plating layer having a second thickness and a second surface coarseness substantially greater than the first surface coarseness;
a Pd plating layer on the second Ni plating layer; and
a protection plating layer on the Pd plating layer.
2. The lead frame of claim 1 wherein the protection plating layer comprises Au or an Au alloy.
3. The lead frame of claim 1 wherein the first thickness is in the range of about 10-50 micro inches.
4. The lead frame of claim 3 wherein the second thickness is in the range of about 1.0-10 micro inches.
5. The lead frame of claim 1 wherein the second thickness is in the range of about 1.0-10 micro inches.
6. The lead frame of claim 5 wherein the first thickness is in the range of about 10-50 micro inches.
7. The lead frame of claim 1 wherein the second thickness is in the range of about 10-50 micro inches.
8. The lead frame of claim 7 wherein the first thickness is in the range of about 1.0-10 micro inches.
9. The lead frame of claim 1 wherein the base metal layer comprises one of Cu and alloy42.
10. The lead frame of claim 1 wherein the Pd plating layer has a thickness in the range of about 0.2-1.0 micro inches.
11. The lead frame of claim 1 wherein the protection plating layer comprises a flash plating.
12. The lead frame of claim 1 wherein one of the first surface coarseness and the second surface coarseness provides a surface gloss in the range of about 0.2-0.8 on the protection plating layer.
13. A lead frame comprising:
a base metal layer;
a first Ni plating layer on the base metal layer, the first Ni plating layer having a first thickness and a first surface coarseness;
a second Ni plating layer on the first Ni plating layer, the second Ni plating layer having a second thickness and a second surface coarseness;
a Pd plating layer on the second Ni plating layer;
a protection plating layer on the Pd plating layer; and
a third Ni plating layer disposed between the second Ni plating layer and the Pd plating layer, wherein the third Ni plating layer has a third thickness and a third surface coarseness wherein the third surface coarseness is different than the first or the second surface coarseness.
14. The lead frame of claim 13 where second surface coarseness is substantially greater than the first surface coarseness and the third surface coarseness.
15. The lead frame of claim 14 wherein the third thickness is in the range of about 1.0-10 micro inches.
16. The lead frame of claim 15 wherein the first thickness is in the range of about 10-50 micro inches.
17. The lead frame of claim 13 wherein the second thickness is in the range of about 1.0-10 micro inches.
18. The lead frame of claim 13 wherein the base metal layer comprises one of Cu and alloy42.
19. The lead frame of claim 13 wherein the third thickness is in the range of about 10-50 micro inches.
20. The lead frame of claim 13 wherein the second thickness is in the range of about 10-50 micro inches.