Reprogrammable metal-to-metal antifuse employing carbon-containing antifuse material
View Patent ↗A reprogrammable metal-to-metal antifuse is disposed between two metal interconnect layers in an integrated circuit. A lower barrier layer is formed from Ti. A lower adhesion-promoting layer is disposed over the lower Ti barrier layer. An antifuse material layer selected from a group comprising at least one of amorphous carbon and amorphous carbon doped with at least one of hydrogen and fluorine is disposed over the lower adhesion-promoting layer. An upper adhesion-promoting layer is disposed over the antifuse material layer. An upper Ti barrier layer is disposed over the upper adhesion-promoting layer.
1. A method for fabricating a reprogrammable metal-to-metal antifuse, comprising:
planarizing an insulating layer and a tungsten plug;
forming a lower Ti barrier layer over said insulating layer and said tungsten plug;
forming a lower adhesion-promoting layer over said lower Ti barrier layer, said lower adhesion-promoting layer selected from the group comprising Si x C y and Si x N y ;
forming an antifuse material layer over said lower adhesion-promoting layer, wherein said antifuse material layer is selected from the group comprising amorphous carbon, amorphous carbon doped with at least one of hydrogen and fluorine, and amorphous silicon carbide;
forming an upper adhesion-promoting layer over said antifuse material layer, said upper adhesion-promoting layer selected from the group comprising Si x C y and Si x N y ;
forming an upper Ti barrier metal layer over said antifuse material layer;
forming an oxide or tungsten hardmask layer over said barrier metal layer;
forming a layer of photoresist over said hardmask layer;
defining said hardmask layer;
removing said photoresist;
defining a shape of a stack for said antifuse by etching said upper Ti barrier layer, said upper adhesion-promoting layer, said antifuse material layer, said lower adhesion-promoting layer, and said lower Ti barrier metal layer using said hardmask layer as a mask;
forming an insulating layer over said stack;
forming an aperture in said insulating layer;
forming a metal interconnect layer over said insulating layer and in said aperture;
forming a second masking layer over said metal interconnect layer; and
defining said metal interconnect layer.
2. The method of claim 1 , wherein said forming said antifuse material layer comprises forming said antifuse material layer to a thickness of from about 10 nm to about 80 nm.
3. The method of claim 1 , wherein said forming said Ti barrier metal layer comprises forming said Ti barrier metal layer to a thickness of from about 25 nm to about 200 nm.
4. The method of claim 1 , wherein said lower and upper adhesion-promoting layers are essentially monolayers.
5. The method of claim 1 , wherein said forming an antifuse material layer comprises depositing said antifuse layer from an acetylene source gas.