CMOS image sensor and a method for fabricating the same
View Patent ↗A CMOS image sensor and method for fabricating the same is disclosed that reconditions, repairs and/or protects a surface of a photodiode area and improves characteristics of the image sensor. The method includes forming a photodiode area and a plurality of transistors, implanting a predetermined ion into a surface of the photodiode area, and forming a surface oxide film on the surface of the photodiode area by oxidation. Therefore, it is possible to recover or repair the photodiode surface damaged during various fabrication processes, reduce or minimize surface leakage of the photodiode during subsequent processes, and improve image sensor characteristics by increasing incident light on the photodiode.
1. A method for fabricating a CMOS image sensor comprising the steps of:
forming a photodiode area and a plurality of transistors in and/or on a semiconductor substrate;
implanting a predetermined ion comprising a Group IVA element into a surface of the photodiode area; and
forming a surface oxide film on the surface of the photodiode area by oxidation.
2. The method according to claim 1 , wherein the surface oxide film on the photodiode area has a curvature.
3. The method according to claim 1 , wherein the surface oxide film is permanent.
4. The method according to claim 1 , further comprising, before the step of implanting a predetermined ion into the surface of the photodiode area, removing a barrier oxide film used during the step of forming the photodiode area and the transistors.
5. The method according to claim 1 , further comprising, before the step of implanting the predetermined ion into the surface of the photodiode area, depositing and patterning a photoresist to expose the photodiode area only.
6. The method according to claim 1 , wherein the predetermined ion comprises germanium.
7. The method according to claim 1 , wherein the step of implanting the predetermined ion into the surface of the photodiode area is performed at an ion implantation energy of 10KeV to 20KeV.
8. The method according to claim 1 , wherein said photodiode area comprises a P-N junction.
9. The method according to claim 1 , wherein said Group IVA element comprises silicon.
10. The method according to claim 1 , wherein gates of said plurality of transistors are formed before said photodiode area.
11. A method for fabricating a CMOS image sensor comprising the steps of:
forming a photodiode area on or in a surface of a semiconductor substrate;
implanting a lattice dislocation ion comprising a Group IVA element into the photodiode area; and
forming an oxide film on the photodiode area under conditions sufficient to repair dislocations resulting from the implanting step.
12. The method of claim 11 , wherein forming the oxide film comprises thermally oxidizing a surface of the photodiode area.
13. The method of claim 11 , wherein the oxide film has a non-uniform thickness.
14. The method of claim 13 , wherein the oxide film has a convex surface.
15. The method of claim 13 , wherein the oxide film focuses incident light on the photodiode.
16. The method of claim 11 , wherein the semiconductor substrate has a barrier film thereon during the photodiode forming step, and the method further comprises removing the barrier film before the step of implanting the lattice dislocation ion.
17. The method of claim 11 , wherein the lattice dislocation ion is implanted at an energy of 10KeV to 20KeV.
18. The method according to claim 11 , wherein said Group IVA element comprises germanium.
19. The method according to claim 11 , wherein said photodiode area comprises a P-N junction.
20. The method according to claim 11 , wherein said Group IVA element comprises silicon.
21. The method according to claim 11 , wherein gates of said plurality of transistors are formed before said photodiode area.