Wire bonding machine capable of removing particles from capillary and cleaning method of capillary bottom tip
View Patent ↗A wire bonding machine capable of removing particles from capillary and cleaning method of capillary bottom tip uses a grinding film of the wire bonding machine mounted on a clamp block. The capillary of the wire bonding machine periodically moves on the grinding film and then, the bottom tip of the capillary is rubbed with and moves on the grinding film at a predetermined distance, whereby various particles formed at the bottom tip of the capillary are removed.
1. A wire bonding machine comprising:
a capillary having a bottom tip;
a vibration unit;
a bonding arm coupled to the capillary and the vibration unit for transmitting ultrasonic waves energy from the vibration unit to the bottom tip of the capillary, wherein the bonding arm moves in a direction of X-Y-Z at a predetermined distance;
a grinding film positioned below the capillary, wherein the bottom tip of the capillary moves along a predetermined path of the grinding film by moving of the bonding arm removing particles formed at the bottom tip of the capillary;
a clamp block positioned below the lower portions of the capillary and bonding arm and on top of a semiconductor device, the clamp block having an open area for wire bonding the semiconductor device;
a clamp positioned on an upper portion of the capillary for securing a wire for wire bonding the semiconductor device;
a cleaning die positioned on and removably attached to the clamp block and directly next to the open area for wire bonding the semiconductor device, the grinding film attached to the cleaning die;
a vibration unit control circuit coupled to the vibration unit to send control signals to the vibration unit;
a clamp control circuit coupled to the clamp for securing and releasing the wire; and
a control mechanism coupled to the vibration unit control circuit and the clamp control circuit, the control mechanism providing automated cleaning of the bottom tip by sending a clamp control signal to allow removal of the wire, sending a vibration unit control signal to transmitting ultrasonic waves energy from the vibration unit to the bottom tip of the capillary and for detecting a present location of the bottom tip of the capillary and comparing the present location to a contact position of the cleaning die to have the bottom tip contact the cleaning die.
2. A wire bonding machine in accordance with claim 1 , wherein the cleaning die positioned on the clamp block and directly next to the open area for wire bonding the semiconductor die minimizes a travel distance of the bottom tip during cleaning.
3. A wire bonding machine in accordance with claim 1 , wherein the grinding film comprises:
a film of a predetermined thickness;
a plurality of grinding particles bonded on the film; and
an adhesive for bonding the plurality of grinding particles on the film.
4. A wire bonding machine in accordance claim 3 , wherein the plurality of grinding particles are selected from one of: SiC, Al 2 O 3 , SD (an artificial diamond), Cr 2 O 3 , Fe 2 O 3 , ZrO 2 , CeO 2 , SiO 2 , BaCO 3 , and a combination thereof.
5. A wire bonding machine in accordance claim 1 , further comprising:
a moving table coupled to the bonding arm for moving the bonding arm in the direction of X-Y; and
a linear motor coupled to the moving table for moving the bonding arm in the direction of Z.
6. A wire bonding machine in accordance claim 1 , wherein the control mechanism comprises:
an X-Y control circuit coupled to the bonding arm for controlling X-Y movement of the bonding arm;
a Z control circuit coupled to the bonding arm for controlling Z movement of the bonding arm;
a position detection sensor for detecting movement of the capillary; and
a comparison circuit for and comparing the present location of the bottom tip of the capillary to the contact position of the cleaning die to minimize movement in an X-Y-Z direction of the capillary.
7. A wire bonding machine in accordance claim 1 , further comprising a position detection sensor coupled to the moving table for detecting movement of the capillary.
8. A wire bonding machine comprising:
a capillary having a bottom tip;
a vibration unit;
a bonding arm coupled to the capillary and the vibration unit for transmitting ultrasonic waves energy from the vibration unit to the bottom tip of the capillary, wherein the bonding arm moves in a direction of X-Y-Z at a predetermined distance;
means positioned below the capillary for removing particles formed at the bottom tip of the capillary when the bottom tip of the capillary moves along a predetermined path of the means;
a clamp block positioned below the lower portions of the capillary and bonding arm and on top of a semiconductor device, the clamp block having an open area for wire bonding the semiconductor device;
a clamp positioned on an upper portion of the capillary for securing a wire for wire bonding the semiconductor device;
a cleaning die positioned on and removably attached to the clamp block and directly next to the open area for wire bonding the semiconductor device, the means for removing particles attached to the cleaning die;
a vibration unit control circuit coupled to the vibration unit to send control signals to the vibration unit;
a clamp control circuit coupled to the clamp for securing and releasing the wire; and
means coupled to the vibration unit control circuit and the clamp control circuit for providing automated cleaning of the bottom tip by sending a clamp control signal to allow removal of the wire, sending a vibration unit control signal to transmitting ultrasonic waves energy from the vibration unit to the bottom tip of the capillary and for detecting a present location of the bottom tip of the capillary and comparing the present location to a contact position of the cleaning die to minimize movement in an X-Y-Z direction between the capillary and the means for removing particles.
9. A wire bonding machine in accordance with claim 8 further comprising means coupled to the bonding arm for moving the bonding arm in the directions of X-Y-Z at predetermined distances.
10. A wire bonding machine in accordance claim 8 , further comprising:
means coupled to the bonding arm for moving the bonding arm in the direction of X-Y; and
means coupled to the bonding arm for moving the bonding arm in the direction of Z.
11. A wire bonding machine in accordance with claim 8 , wherein the means for removing particles comprises:
a film of a predetermined thickness;
a plurality of grinding particles bonded on the film; and
means for bonding the plurality of grinding particles on the film.
12. A wire bonding machine in accordance claim 8 , further comprising means coupled to the moving table for detecting movement of the capillary.
13. A wire bonding machine comprising:
a capillary having a bottom tip;
a bonding arm coupled to the capillary, wherein the bonding arm moves in a direction of X-Y-Z at a predetermined distance;
a grinding film positioned below the capillary, wherein bonding arm moves the bottom tip of the capillary along a predetermined path of the grinding film;
a clamp block positioned below the lower portions of the capillary and bonding arm and on top of a semiconductor device, the clamp block having an open area for wire bonding the semiconductor device;
a cleaning die positioned on and removably attached to the clamp block and directly next to the open area for wire bonding the semiconductor device, the grinding film attached to the cleaning die; and
a control mechanism for providing automated cleaning of the bottom tip by sending control signals to allow removal of a wire used for wire bonding, to transmit ultrasonic waves energy to the bottom tip of the capillary and for detecting a present location of the bottom tip of the capillary and comparing the present location to a contact position of the cleaning die to minimize movement in an X-Y-Z direction between the capillary and the cleaning die.
14. A wire bonding machine in accordance with claim 13 , further comprising a clamp attached to an upper portion of the capillary for separating a wire from the capillary.
15. A wire bonding machine in accordance with claim 13 wherein the cleaning die positioned on the clamp block and adjacent to the area for wire bonding minimizes a travel distance of the bottom tip during cleaning.
16. A wire bonding machine in accordance claim 13 , further comprising:
a moving table coupled to the bonding arm for moving the bonding arm in the direction of X-Y; and
a linear motor coupled to the moving table for moving the bonding arm in the direction of Z.
17. A wire bonding machine in accordance claim 13 , wherein the control mechanism comprises:
an X-Y control circuit coupled to the bonding arm for controlling X-Y movement of the bonding arm;
a Z control circuit coupled to the bonding arm for controlling Z movement of the bonding arm;
a position detection sensor for detecting movement of the capillary; and
a comparison circuit for and comparing the present location of the bottom tip of the capillary to the contact position of the cleaning die to minimize movement in an X-Y-Z direction of the capillary.
18. A wire bonding machine in accordance claim 13 , further comprising a position detection sensor coupled to the moving table for detecting movement of the capillary.