Method for forming narrow structures in a semiconductor device
View Patent ↗A method of forming multiple conductive structures in a semiconductor device includes forming spacers adjacent side surfaces of a mask, where the mask and the spacers are formed on a conductive layer. The method also includes etching at least one trench in a portion of the conductive layer not covered by the spacers or the mask. The method may further include depositing a material over the semiconductor device, removing the mask and etching the conductive layer to remove portions of the conductive layer not covered by the spacers or the material, where remaining portions of the conductive layer form the conductive structures.
1. A method of forming a plurality of structures in a semiconductor device, the method comprising:
forming a mask layer over a first layer, the mask layer directly contacting the first layer;
patterning the mask layer to form a mask that includes side surfaces;
forming spacers adjacent the side surfaces of the mask;
etching at least one trench in a portion of the first layer not covered by the mask;
depositing a second material over the semiconductor device, the second material filling the at least one trench;
planarizing the second material, the planarizing removing a portion of the second material, a portion of the mask and portions of the spacers;
removing the mask;
etching the first layer to remove all portions of the first layer not covered by remaining portions of the spacers and the second material, where remaining portions of the first layer comprise the plurality of structures and where the forming spacers adjacent side surfaces of the mask comprises:
forming the spacers to a first width, the first width being approximately equal to a width of the plurality of structures; and
forming a memory device between two adjacent structures of the plurality of structures.
2. The method of claim 1 , where the width of each of the plurality of structures ranges from about 75 Å to about 400 Å.
3. The method of claim 1 , where the planarizing the second material includes:
planarizing the mask and the spacers such that the remaining portions of the spacers and the second material form a T-shaped structure.
4. The method of claim 1 , where the planarizing the second material includes:
polishing the second material using the mask as a polish stop, where during the polishing, the remaining portions of the spacers extend laterally from the second material.
5. The method of claim 1 , where the etching at least one trench comprises:
etching at least one trench to a depth ranging from about 500 Å to about 2,000 Å.
6. The method of claim 1 , where the first layer comprises at least one of silicon or germanium.
7. The method of claim 6 , where the spacers comprise an oxide and the second material comprises an oxide.
8. The method of claim 1 , where the plurality of structures each have approximately the same width.
9. A method of manufacturing a semiconductor device, the method comprising:
forming a mask layer over a conductive layer;
patterning the mask layer to form a plurality of masks over a conductive layer, where the plurality of masks include sidewalls;
forming spacers adjacent the sidewalls of the plurality of masks;
forming a plurality of trenches in the conductive layer;
depositing a first material to fill at least a portion of each of the plurality of trenches;
polishing the first material using the masks as a polish stopping material, where during the polishing, a portion of each of the spacers is removed and a remaining portion of each of the spacers extends laterally beyond a side surface of one of the respective plurality of trenches;
removing the plurality of masks;
etching the conductive layer to remove all portions of the conductive layer not protected by the spacers or the first material, where remaining portions of the conductive layer form a plurality of conductive structures; and
processing the plurality of conductive structures to form at least one of bit lines or word lines in the semiconductor device.
10. The method of claim 9 , further comprising:
removing the spacers and the first material.
11. The method of claim 9 , where the spacers and the first material comprise a same material.
12. The method of claim 9 , where the spacers and the first material comprise silicon oxide.
13. The method of claim 9 , where each of the conductive structures comprises silicon and has a width ranging from about 75 Å to about 400 Å.
14. The method of claim 9 , where the forming spacers comprises:
forming spacers to a predetermined width, where a width of the conductive structures is based on the predetermined width.
15. A method of manufacturing a semiconductor device, comprising:
forming a mask layer over a conductive layer, the mask layer directly contacting the conductive layer;
patterning the mask layer to form a plurality of masks, the plurality of masks including sidewalls;
forming spacers adjacent the sidewalls of the plurality of masks;
forming a plurality of trenches in the conductive layer;
depositing a first material to fill each of the plurality of trenches;
polishing the first material and the spacers such that an upper surface of the first material is substantially planar with an upper surface of the masks, where remaining portions of the spacers and the first material form T-shaped structures;
removing the plurality of masks;
etching the conductive layer to remove portions of the conductive layer not protected by the spacers or the first material, where remaining portions of the conductive layer form a plurality of conductive structures; and
forming a memory cell stack structure between two adjacent structures of the plurality of conductive structures.
16. The method of claim 15 , where the plurality of conductive structures comprise bit lines associated with the memory well stack structure.