Method of forming a self-aligned transistor
View Patent ↗In one embodiment, a transistor is formed to use two conductors to make electrical connection to one of the active regions of the transistor.
1. A method of forming a transistor comprising:
providing a semiconductor substrate having a first surface;
forming an oxide layer overlying at least a portion of the first surface of the semiconductor substrate;
forming a first conductor having a second surface overlying a portion of both the oxide layer and a first portion of the first surface, and having a sidewall;
removing a portion of the oxide layer and forming a second conductor extending from the second surface to electrically contact the first portion of the first surface wherein the second conductor is overlying the oxide layer and is not on the sidewall of the first conductor;
forming a first doped region in the first surface and underlying the second conductor;
forming a second doped region on a second portion of the first surface;
forming a third conductor overlying and electrically contacting the second doped region.
2. The method of claim 1 wherein forming the second conductor extending from the second surface includes forming an opening through the first conductor that exposes the sidewall of the first conductor, forming a protective spacer on the sidewall of the first conductor, forming a recess underlying the first conductor, and filling the recess with a conductor material.
3. The method of claim 2 further including forming a dielectric overlying the first conductor prior to forming the second conductor, forming the opening through the dielectric and exposing a sidewall of the dielectric and the sidewall of the first conductor, and forming the protective spacer on the sidewall of the dielectric and on the sidewall of the first conductor.
4. The method of claim 1 wherein forming the first doped region includes forming the first doped region of a first conductivity type and forming the second doped region of a second conductivity type.
5. A method of forming a semiconductor device comprising:
providing a semiconductor substrate having a first surface;
forming a first conductor having a second surface overlying a first portion of the first surface and having a sidewall;
forming a second conductor on the second surface after forming the first conductor wherein the second conductor is electrically contacting a first doped region on the first portion of the first surface of the semiconductor substrate including forming the second conductor extending from a portion of the second surface and not on the sidewall of the first conductor;
forming a second doped region on a second portion of the first surface and electrically contacting the first doped region; and
forming a third conductor overlying and electrically contacting the second doped region and not touching the first conductor or the second conductor.
6. The method of claim 5 wherein forming the second conductor on the second surface and electrically contacting the first doped region includes forming the second conductor from a material having a dopant of a first conductivity type and diffusing a portion of the dopant from the second conductor into the first surface to form the first doped region.
7. The method of claim 5 wherein forming the second doped region includes implanting dopants of a second conductivity type into the second portion of the first surface.
8. The method of claim 5 wherein forming the second doped region includes forming an opening through the first conductor and exposing the second portion of the first surface.
9. A method of forming a semiconductor device comprising:
providing a semiconductor substrate having a first surface;
forming a first conductor having a second surface overlying a first portion of the first surface and having a sidewall;
forming a protective spacer on the sidewall of the first conductor;
subsequently forming a second conductor on the second surface and electrically contacting a first doped region on the first portion of the first surface of the semiconductor substrate including forming the second conductor extending from a portion of the second surface and not on the sidewall of the first conductor;
forming a second doped region on a second portion of the first surface and electrically contacting the first doped region; and
forming a third conductor overlying and electrically contacting the second doped region and not touching the first conductor or the second conductor.