IP Library Granted Patent US 7,364,936
Granted Patent B2
US 7,364,936 · App. 11/250,475 · Granted Apr 29, 2008

CMOS image sensor and method for fabricating the same

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Quick Facts
Patent No.
US 7,364,936
App. No.
11/250,475
Granted
Apr 29, 2008
Kind
B2
Abstract

A CMOS image sensor and a method for fabricating the same improve photosensitivity by imparting a color filter layer with the function of a microlens layer. The CMOS image sensor includes a semiconductor substrate; a plurality of photo-sensing elements formed in the semiconductor substrate; and a color filter layer comprised of a plurality of color filters for filtering light according to wavelength, wherein the plurality of color filters correspond to the plurality of photo-sensing elements and each color filter has a predetermined curvature for focusing light and for transmitting the focused light according to a corresponding wavelength.

Claims (15)

1. A method for fabricating a CMOS image sensor comprising:

forming a color filter layer comprised of a plurality of color filters for filtering light according to wavelength, wherein the plurality of color filters correspond to a plurality of photo-sensing elements formed in a semiconductor substrate;

forming a sacrificial layer for microlens formation on the color filter layer;

patterning the sacrificial layer to form a plurality of lens formation blocks corresponding to the plurality of color filters;

reflowing the patterned sacrificial layer to impart each lens formation block with a predetermined curvature; and

imparting each color filter of the plurality of color filters with a desired predetermined curvature corresponding to the predetermined curvature of the lens formation blocks by etching the patterned sacrificial layer and the color filter layer to completely remove the patterned sacrificial layer.

2. The method of claim 1 , wherein the etching is an isotropic etching.

3. The method of claim 2 , wherein the isotropic etching is a wet etching process.

4. The method of claim 1 , wherein the color filter layer is planarized before forming said sacrificial layer.

5. The method of claim 1 , further comprising:

forming a planarization layer on the color filter layer before forming said sacrificial layer.

6. The method of claim 5 , wherein the etching removes the planarization layer.

7. The method of claim 1 , further comprising:

forming an insulating interlayer covering the semiconductor substrate including said plurality of photo-sensing elements,

wherein the color filter layer is formed on the insulating interlayer.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 10, 2019
From: DB HITEK CO., LTD.
To: COLUMBA TECHNOLOGIES INC.
Reel/Frame 049709/0857 →
CHANGE OF NAME Recorded Nov 30, 2017
From: DONGBU HITEK CO., LTD.
To: DB HITEK CO., LTD
Reel/Frame 044555/0913 →
MERGER AND CHANGE OF NAME Recorded Nov 29, 2017
From: DONGBU ELECTRONICS CO., LTD.; DONGBU HITEK CO., LTD.
To: DONGBU HITEK CO., LTD.
Reel/Frame 044533/0523 →
CHANGE OF NAME Recorded Jun 15, 2006
From: DONGBUANAM SEMICONDUCTOR INC.
To: DONGBU ELECTRONICS CO., LTD.
Reel/Frame 018176/0351 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 17, 2005
From: HONG, CHANG YOUNG
To: DONGBUANAM SEMICONDUCTOR INC.
Reel/Frame 017720/0938 →