Method for packaging a semiconductor device
View Patent ↗A method for packaging a semiconductor device includes forming through holes ( 12 ) in a base substrate ( 10 ) and depositing a conductive material ( 14 ) on a first side ( 16 ) of the base substrate ( 10 ) to form a conductive layer ( 18 ) such that the conductive material ( 14 ) fills the through holes ( 12 ). The conductive layer ( 18 ) is patterned and etched to form interconnect traces and pads ( 22 ). Conductive supports ( 24 ) are formed on the pads ( 22 ) such that the conductive supports ( 24 ) extend through respective ones of the through holes ( 12 ).
1. A method for packaging a stackable semiconductor device, comprising the steps of:
forming a plurality of through holes in a base substrate;
depositing a conductive material on at least a first side of the base substrate to form a conductive layer, wherein the conductive material at least partially fills the plurality of through holes;
patterning and etching the conductive layer to form a plurality of interconnect traces and a plurality of pads;
forming a plurality of conductive supports on the plurality of pads, wherein the plurality of conductive supports extends in a first, downward direction through respective ones of the plurality of through holes and in a second, upward direction above the through holes to a predetermined height that is much greater than a height of the conductive layer;
electrically coupling at least one die to the plurality of pads, wherein the conductive supports extend both above and below the die; and
performing a moulding operation to encapsulate the die, wherein at least one end of each conductive support is exposed.
2. The method for packaging a stackable semiconductor device of claim 1 , further comprising shielding a second side of the base substrate from the conductive material.
3. The method for packaging a stackable semiconductor device of claim 1 , wherein the base substrate comprises a polyimide tape.
4. The method for packaging a stackable semiconductor device of claim 1 , wherein the conductive material is copper.
5. The method for packaging a stackable semiconductor device of claim 4 , wherein the plurality of conductive supports is made of copper.
6. The method for packaging a stackable semiconductor device of claim 1 , further comprising applying an electroless finish to the plurality of interconnect traces, the plurality of pads and the plurality of conductive supports.
7. The method for packaging a stackable semiconductor device of claim 6 , wherein the electroless finish comprises one of nickel, gold and a nickel-gold alloy.
8. The method for packaging a stackable semiconductor device of claim 1 , wherein each conductive support has a width of about 200 microns.
9. The method for packaging a stackable semiconductor device of claim S, wherein the plurality of conductive supports are substantially parallel to each other.
10. the method for packaging a stackable semiconductor device of claim 9 , wherein the plurality of conductive supports are substantially perpendicular to the base substrate.
11. The method for packaging a stackable semiconductor device of claim 1 , wherein the die is electrically coupled to the substrate bonding pads via wire bonds.
12. The method for packaging a stackable semiconductor device of claim 1 , wherein the die is electrically coupled to the substrate bonding pads via flip chip bumps.
13. The method for packaging a stackable semiconductor device of claim 1 , wherein a plurality of die is electrically coupled to the interconnect traces and pads and encapsulated thereon, thereby forming a first stackable assembly, the method further comprising:
stacking a second stackable assembly on the first stackable assembly, wherein the first and second stackable assemblies are electrically coupled one to the other to form a stacked assembly; and
singulating the stacked assembly into a plurality of stacked packages.
14. The method for packaging a stackable semiconductor device of claim 13 , further comprising depositing a second conductive layer over the stacked assembly, and attaching a discrete passive device on the second conductive layer.
15. The method for packaging a stackable semiconductor device of claim 13 , wherein the plurality of stackable assemblies are stacked using one of solder ball attach, paste print and reflow, anisotropic conductive film and polymer conductor paste.
16. A method for packaging a semiconductor device, comprising the steps of:
forming a plurality of through holes in a base substrate;
depositing a conductive material on at least a first side of the base substrate to form a conductive layer, wherein the conductive material at least partially fills the plurality of through holes;
patterning and etching the conductive layer to form a plurality of interconnect traces and a plurality of pads;
forming a plurality of substantially parallel conductive supports on the plurality of pads, wherein the plurality of conductive supports are substantially perpendicular to the base substrate and extend in a first, downward direction through respective ones of the plurality of through holes and in a second, upward direction above the through holes to a predetermined height that is much greater than a height of the conductive layer;
electrically coupling at least one die to the interconnect traces and pads, wherein the conductive supports extend both above and below the die; and
encapsulating the plurality of die and the conductive supports, wherein at least one end of the conductive supports are exposed, thereby forming a first stackable assembly.
17. The method for packaging a stackable semiconductor device of claim 16 , wherein a plurality of die is electrically coupled to the interconnect traces and pads, the method further comprising:
forming a second stackable assembly substantially similar to the first stackable assembly;
forming a stacked assembly by stacking the second stackable assembly on the first stackable assembly, wherein the first and second stackable assemblies are electrically coupled one to the other by way of the conductive supports; and
singulating the stacked assembly into a plurality of stacked packages.
18. A method for packaging a semiconductor device, comprising the steps of:
forming a plurality of through holes in a base substrate, wherein the base substrate comprises a polyimide tape;
depositing a conductive material on at least a first side of the base substrate to form a conductive layer, wherein the conductive material at least partially fills the plurality of through holes;
patterning and etching the conductive layer to form a plurality of interconnect traces and a plurality of pads;
forming a plurality of substantially parallel conductive supports on the plurality of pads, wherein the plurality of conductive supports are substantially perpendicular to the base substrate and extend in a first, downward direction through respective ones of the plurality of through holes and in a second, upward direction above the through holes to a predetermined height that is much greater than a height of the conductive layer; and
applying an electroless finish to the plurality of interconnect traces, the plurality of pads and the plurality of conductive supports;
electrically coupling a plurality of die to the interconnect traces and pads, wherein the conductive supports extend both above and below the plurality of die;
performing a moulding operation to encapsulate the plurality of die, wherein at least one end of each conductive support is exposed, thereby forming a first stackable assembly;
forming a second stackable assembly substantially similar to the first stackable assembly;
forming a stacked assembly by stacking the second stackable assembly on the first stackable assembly, wherein the first and second stackable assemblies are electrically coupled one to the other by way of the conductive supports; and
singulating the stacked assembly into a plurality of stacked packages.