Method of producing a microelectronic electrode structure, and microelectronic electrode structure
View Patent ↗In a method for producing a microelectronic electrode structure a first wiring plane is prepared, an insulating region on the first wiring plane is provided, a through-hole in the insulating region is formed, a ring electrode in the through-hole is formed, and a second wiring plane is formed on the insulating region. The ring electrode comprises a first side and a second side, the ring electrode is electrically connected on the first side to the first wiring plane, and the second wiring plane is electrically connected to the second side of the ring electrode.
1. A microelectronic electrode structure, comprising:
a first wiring plane;
an insulating region on said first wiring plane;
a through-hole in said insulating region;
a ring electrode in said through-hole; said ring electrode comprising a first side and a second side and said ring electrode being electrically connected on said first side to said first wiring plane by a contact plug formed in said through-hole between said first wiring plane and said ring electrode, said contact plug being adjacent to said first side of said ring electrode, and said contact plug comprising a Ti/TiN liner region and a tungsten region; and
a second wiring plane on said insulating region, said second wiring plane being electrically connected to said second side of said ring electrode.
2. The electrode structure of claim 1 , wherein said ring electrode is filled with an insulating plug.
3. The electrode structure of claim 1 , comprising a region of a PCM material formed in said through-hole between said ring electrode and said second wiring plane; said region of a PCM material being adjacent to said second side of said ring electrode.
4. The electrode structure of claim 3 , wherein said region of the PCM material is completely in said through-hole.
5. The electrode structure of claim 3 , wherein said region of the PCM material is in said through-hole and above said insulating region.
6. The electrode structure of claim 3 , wherein said region of the PCM material is outside said through-hole above said insulating region.
7. The electrode structure of claim 1 , comprising a spacer-like insulating ring region formed in said through-hole between said insulating region and said ring electrode.
8. The electrode structure of claim 1 , wherein said insulating region comprises a silicon oxide layer and a silicon nitride layer lying above said silicon oxide layer.
9. The electrode structure of claim 1 , wherein said ring electrode is sunken into said through-hole with respect to an upper side of said insulating region.
10. The electrode structure of claim 1 , being a PCM memory.