IP Library Granted Patent US 7,491,993
Granted Patent B2
US 7,491,993 · App. 11/315,627 · Granted Feb 17, 2009

CMOS image sensor and method for manufacturing the same

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Quick Facts
Patent No.
US 7,491,993
App. No.
11/315,627
Granted
Feb 17, 2009
Kind
B2
Abstract

Disclosed are a CMOS image sensor capable of improving the focusing capability of light and a method for manufacturing the same. The CMOS image sensor includes a plurality of first micro-lenses formed in the upper part of the planarization layer, each of the first micro-lenses arranged over a corresponding photodiode, and a plurality of second micro-lenses formed on the planarization layer, each of the plurality of second micro-lenses wrapping a corresponding first micro-lens respectively.

Claims (32)

1. A CMOS image sensor comprising:

a semiconductor substrate;

a plurality of photodiodes arranged on the semiconductor substrate with a predetermined distance therebetween;

an inter-insulation layer formed on the overall surface of the semiconductor substrate including the photodiodes;

a plurality of color filter layers arranged on the inter-insulation layer with a predetermined distance therebetween;

a planarization layer formed on the overall surface of the semiconductor substrate including the color filter layers;

a plurality of first micro-lenses formed in upper part of the planarization layer, each of the first micro-lenses arranged over a corresponding photodiode, respectively; and

a plurality of second micro-lenses formed on the planarization layer, each of the plurality of second micro-lenses wrapping a corresponding first micro-lens respectively.

2. The sensor as set forth in claim 1 , wherein the first micro-lenses protrude from the surface of the planarization layer.

3. The sensor as set forth in claim 1 , wherein each of the first micro-lenses has a width narrower than that of a corresponding color filter array.

4. The sensor as set forth in claim 1 , wherein the first and second micro-lenses are made of different materials having different refraction indexes from each other.

5. The sensor as set forth in claim 4 , wherein the first and second micro-lenses are made of SiON and photoresist respectively.

6. The sensor as set forth in claim 4 , wherein the first and second micro-lenses are made of SiO 2 and photoresist respectively.

7. The sensor as set forth in claim 4 , wherein the first and second micro-lenses are both photoresist materials, wherein the first micro-lens has an index of refraction that is smaller than the index of refraction of the second micro-lens.

8. A CMOS image sensor comprising:

a plurality of first micro-lenses formed in upper part of the planarization layer, each of the first micro-lenses arranged over a corresponding photodiode; and

a plurality of second micro-lenses formed on the planarization layer, each of the plurality of second micro-lenses wrapping a corresponding first micro-lens respectively;

wherein the index of refraction of the first micro-lenses is smaller than the index of refraction of the second micro-lenses.

9. A method for manufacturing a CMOS image sensor comprising the steps of:

forming an inter-insulation layer over a semiconductor substrate;

forming a plurality of color filter layers on the inter-insulation to be arranged with a predetermined distance therebetween;

forming a planarization layer on the overall surface of the semiconductor substrate including the color filter layers;

forming a plurality of trenches having a predetermined depth in upper part of the planarization layer to correspond to the photodiodes in a one-to-one ratio;

forming first micro-lenses in the trenches, respectively; and

forming second micro-lenses on the planarization layer to wrap the first micro-lenses, respectively.

10. The method as set forth in claim 9 , wherein the first and second micro-lenses are made of different materials having different refraction indexes from each other.

11. The method as set forth in claim 9 , wherein the step of forming the second micro-lenses comprises:

coating a lens forming material layer on the, overall surface of the semiconductor substrate including the first micro-lenses; and

selectively patterning the lens forming material layer.

12. The method as set forth in claim 11 , wherein the step of forming the second micro-lenses further comprises performing a reflow process of the patterned lens-forming material layer.

13. The method as set forth in claim 9 , further comprising the step of curing the second micro-lenses.

14. The method as set forth in claim 13 , wherein the step of curing the second micro-lenses comprises irradiating ultraviolet rays onto the second micro-lenses.

Assignments (6)
CHANGE OF NAME Recorded Nov 3, 2021
From: CONVERSANT INTELLECTUAL PROPERTY INC.
To: MOSAID TECHNOLOGIES INCORPORATED
Reel/Frame 058793/0748 →
RELEASE OF SECURITY INTEREST Recorded Nov 11, 2020
From: CPPIB CREDIT INVESTMENTS INC.
To: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
Reel/Frame 054385/0435 →
AMENDED AND RESTATED U.S. PATENT SECURITY AGREEMENT (FOR NON-U.S. GRANTORS) Recorded Aug 22, 2018
From: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
To: CPPIB CREDIT INVESTMENTS, INC.
Reel/Frame 046900/0136 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2017
From: DONGBU HITEK CO. LTD.; DONGBU ELECTRONICS CO., LTD.
To: CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.
Reel/Frame 041330/0143 →
CHANGE OF NAME Recorded Jun 15, 2006
From: DONGBUANAM SEMICONDUCTOR INC.
To: DONGBU ELECTRONICS CO., LTD.
Reel/Frame 018176/0351 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 21, 2006
From: KIM, SHANG WON
To: DONGBUANAM SEMICONDUCTOR, INC.
Reel/Frame 017578/0365 →