Semiconductor device and method for controlling operation thereof
View Patent ↗A semiconductor device includes a semiconductor substrate, word lines, global bit lines, and inversion gates that form inversion layers serving as local bit lines in the semiconductor substrate. The inversion layers are electrically connected to the global bit lines and a memory cell uses the inversion layers as a source and a drain.
1. A semiconductor device comprising:
a semiconductor substrate;
word lines;
global bit lines;
inversion gates formed on the semiconductor substrate, wherein the inversion gates form inversion layers serving as local bit lines in the semiconductor substrate, the inversion layers being electrically connected to the global bit lines;
an oxide-nitride-oxide (ONO) layer overlying the inversion gates and the semiconductor substrate, wherein a nitride layer of the ONO layer is an insulating layer; and
a memory cell formed between adjacent inversion gates and using the inversion layers as a source and a drain, the memory cell storing two bits, one bit stored on either side of a portion of the nitride layer that is interposed between adjacent inversion gates.
2. The semiconductor device as claimed in claim 1 , wherein the inversion layers are connected to the global bit lines via metal interconnections.
3. The semiconductor device as claimed in claim 1 , further comprising
a select circuit that supplies the inversion gates with a given voltage for programming or erasing the memory cell.
4. The semiconductor device as claimed in claim 1 , wherein the inversion gates include a first inversion gate forming an inversion layer serving as the source, a second inversion gate forming an inversion layer serving as the drain, and a third inversion gate provided between the first and second inversion gates,
the semiconductor device further comprising
a select circuit that supplies, at the time of writing, the first through third inversion gates with predetermined voltages so that a memory cell to be subjected to writing can be selected.
5. The semiconductor device as claimed in claim 4 , wherein the select circuit supplies the third inversion gate, at the time of writing, with a first predetermined write voltage to weaken a channel formed between the source and drain in the semiconductor substrate.
6. The semiconductor device as claimed in claim 4 , wherein:
the inversion gates further include a fourth inversion gate that is provided on the semiconductor substrate at a side of the first inversion gate opposite to a side thereof at which the third inversion gate is provided; and
wherein the select circuit supplies the fourth inversion gate, at the time of writing, with a second predetermined write voltage that cuts a channel formed in the semiconductor substrate.
7. The semiconductor device as claimed in claim 1 , further comprising
a write voltage supply circuit that supplies the inversion layers, at the time of writing, with predetermined voltages for writing.
8. The semiconductor device as claimed in claim 1 , further comprising
a voltage supply circuit that supplies the inversion layers and a word line, at the time of erasing, with predetermined voltages for drawing out electrons injected in the memory cell to the semiconductor substrate by virtue of a Fowler-Nordheim (FN) tunneling effect.
9. The semiconductor device as claimed in claim 1 , further comprising
a voltage supply circuit that supplies a word line, at the time of erasing, with a predetermined erase voltage for drawing out electrons injected in the memory cell to the word line by virtue of an FN tunneling effect.
10. The semiconductor device as claimed in claim 1 , further comprising
a voltage supply circuit that supplies the inversion gates and a word line, at the time of erasing, with predetermined voltages for drawing out electrons injected in the memory cell to the inversion gates by virtue of an FN tunneling effect.
11. The semiconductor device as claimed in claim 1 , further comprising:
column sets that include the global bit lines; and
a decoder connecting a given global bit line in each of the column sets to a respective page buffer via a common select signal line.
12. The semiconductor device as claimed in claim 1 , wherein the inversion layers are shared by multiple memory cells.
13. The semiconductor device as claimed in claim 1 , wherein the memory cell is a SONOS type memory cell.
14. The semiconductor device as claimed in claim 1 , wherein the semiconductor device is a semiconductor memory device.
15. A method in a semiconductor device including a memory cell comprising the steps of:
forming inversion layers serving as local bit lines in a semiconductor substrate, wherein the inversion layers include a first inversion gate forming an inversion layer serving as a source, a second inversion gate forming an inversion layer serving as a drain, and a third inversion gate provided between the first and second inversion gates;
electrically connecting the inversion layers to global bit lines;
selecting a word line; and
writing to the memory cell by programming one or more of two portions of a nitride layer located at either side of the third inversion gate, wherein the nitride layer is a middle layer of an oxide-nitride-oxide (ONO) layer which overlays the first, second and third inversion gates and the semiconductor substrate, and wherein each of the two portions of the nitride layer stores one bit.
16. The method as claimed in claim 15 , wherein:
the step of forming comprises supplying the first through third inversion gates, at the time of writing, with predetermined voltages so that the memory cell can be selected.
17. The method as claimed in claim 16 , wherein the step of forming further comprises supplying the third inversion gate, at the time of writing, with a first predetermined write voltage to weaken a channel formed between the source and drain in the semiconductor substrate.
18. The method as claimed in claim 16 , wherein:
the inversion gates further comprise a fourth inversion gate that is provided at a side of the first inversion gate opposite to a side thereof at which the third inversion gate is provided, and
wherein the step of forming further comprises supplying the fourth inversion gate, at the time of writing, with a second predetermined write voltage that cuts a channel formed in the semiconductor substrate.
19. The method as claimed in claim 15 , further comprising the step of supplying the inversion layers, at the time of writing, with a third predetermined write voltage via the global bit lines.
20. The method as claimed in claim 15 , further comprising the step of supplying the inversion layers and a word line, at a time of erasing, with predetermined voltages for drawing out electrons injected in the memory cell to the semiconductor substrate by virtue of a Fowler-Nordheim (FN) tunneling effect.