Method of forming double gate dielectric layers and semiconductor device having the same
View Patent ↗A method of forming double gate dielectric layers composed of an underlying oxide layer and an overlying oxy-nitride layer is provided to prevent degradation of gate dielectric properties due to plasma-induced charges. In the method, the oxide layer is thermally grown on a silicon substrate under oxygen gas atmosphere to have a first thickness, and then the oxy-nitride layer is thermally grown on the oxide layer under nitrogen monoxide gas atmosphere to have a second thickness smaller than the first thickness. The substrate may have a high voltage area and a low voltage area, and the oxide layer may be partially etched in the low voltage area so as to have a reduced thickness. The oxy-nitride layer behaves like a barrier, blocking the inflow of the plasma-induced charges.
1. A method of forming double gate dielectric layers of a semiconductor device, the method comprising:
thermally growing an oxide layer on a silicon substrate having a high voltage area and a low voltage area under oxygen gas atmosphere, the oxide layer having a first thickness;
partially etching a portion of the oxide layer formed on the low voltage area so that the portion of the oxide layer formed on the low voltage area has a reduced thickness; and
thermally growing an oxy-nitride layer on the oxide layer under nitrogen monoxide gas atmosphere, the oxy-nitride layer having a second thickness smaller than the first thickness.
2. The method of claim 1 , wherein the first thickness of the oxide layer is about 50˜70 Å.
3. The method of claim 1 , wherein the second thickness of the oxy-nitride layer is about 5˜15 Å.
4. The method of claim 1 , wherein the reduced thickness of the oxide layer is about 20˜30 Å.