Semiconductor device and method for manufacturing the same including two antireflective coating films
View Patent ↗A method for manufacturing a semiconductor device deposits a plurality of bottom antireflective coating films to prevent a standing wave caused by a light source of a short wavelength in forming a fine pattern. The method includes forming a pattern formation layer on an entire surface of a wafer, forming two or more bottom antireflective coating films on the pattern formation layer, forming a photoresist film pattern on a predetermined region of the bottom antireflective coating films, etching the bottom antireflective coating films using the photoresist film pattern as a mask, forming sidewall spacers at sides of the photoresist film pattern, and etching the pattern formation layer using the sidewall spacers and the photoresist film pattern as masks.
1. A method for manufacturing a semiconductor device comprising:
forming a gate insulating film on a surface of a substrate;
sequentially forming a polysilicon layer and a first insulating film on the gate insulating film;
forming at least two bottom antireflective coating films on the first insulating film;
forming a photoresist film pattern on a predetermined region of the bottom antireflective coating films;
sequentially etching the bottom antireflective coating films and the first insulating film using the photoresist film pattern as a mask to form a first insulating film pattern;
forming sidewall spacers at sides of the first insulating film pattern; and
etching the polysilicon layer using the sidewall spacers and the first insulating film pattern as masks;
wherein the at least two bottom antireflective coating films are formed of the same material by successive coating and baking processes.
2. The method as claimed in claim 1 , further comprising:
sequentially forming the bottom antireflective coating films by performing separate coating and baking processes.
3. The method as claimed in claim 1 , further comprising:
forming the bottom antireflective coating films at a thickness of about 100 nm or less.
4. The method as claimed in claim 1 , further comprising:
forming the bottom antireflective coating films by spin coating a solvent having antireflective material dissolved therein onto the first insulating film.
5. A method for manufacturing a semiconductor device, comprising:
forming a gate insulating film on a surface of a substrate;
sequentially forming a polysilicon layer and an insulating film on the gate insulating film;
coating a first bottom antireflective coating film on the insulating film;
baking the first bottom antireflective coating film;
coating a second bottom antireflective coating film on the first bottom antireflective coating film immediately after baking the first bottom antireflective coating film, wherein the first bottom antireflective coating film and the second bottom coating film are formed of the same material;
forming a photoresist film pattern on a predetermined region of the second bottom antireflective coating film;
sequentially etching the first and second bottom antireflective coating films and the insulating film using the photoresist film pattern as a mask to form an insulating film pattern;
forming sidewall spacers at sides of the insulating film pattern; and
etching the polysilicon layer using the sidewall spacers and the insulating film pattern as masks.