Fabricating method of semiconductor device
View Patent ↗A fabricating method of a semiconductor device is provided. The method comprises the steps of preparing a semiconductor substrate having an active area with a high voltage device area and a low voltage device area and an inactive area, forming a trench in the inactive area of the semiconductor substrate, forming a sacrifice oxide layer on an inner surface of the trench, forming a liner oxide layer on the sacrifice oxide layer, forming a gap-fill oxide layer as a device isolation layer on the liner oxide layer to fill up the trench, forming a buffer oxide layer on top surfaces of the liner and sacrifice oxide layers of the device isolation layer, and forming a gate oxide layer on the high voltage device area of the semiconductor substrate to have a uniform thickness.
1. A method of fabricating a semiconductor device, comprising the steps of:
preparing a semiconductor substrate having an active area with a high voltage device area and a low voltage device area and an inactive area;
forming a trench in the inactive area of the semiconductor substrate;
forming a sacrifice oxide layer on an inner surface of the trench;
forming a liner oxide layer on the sacrifice oxide layer;
forming a gap-fill oxide layer as a device isolation layer on the liner oxide layer to fill up the trench;
forming a buffer oxide layer on top surfaces of the liner and sacrifice oxide layers of the device isolation layer; and
forming a gate oxide layer on the high voltage device area of the semiconductor substrate to have a uniform thickness.
2. A method of fabricating a semiconductor device, comprising the steps of:
preparing a semiconductor substrate having an active area with a high voltage device area and a low voltage device area and an inactive area;
forming a nitride layer pattern on the semiconductor substrate to expose a portion corresponding to the inactive area;
etching the semiconductor substrate of the exposed portion using the nitride layer pattern as a mask, to form a trench in the inactive area of the semiconductor substrate;
etching a portion of the nitride layer pattern in the vicinity of an edge of the trench such that the etched portion forms an interior angle of less than 90° relative to the top surface of the device;
forming a liner oxide layer on an inner surface of the trench to have a rounded cross-section at a portion contacting with a top surface of the semiconductor substrate;
forming a gap-fill oxide layer on the liner oxide layer to fill up the; and
forming a gate oxide layer on the high voltage device area of the semiconductor substrate to have a uniform thickness.
3. A method of fabricating a semiconductor device, comprising the steps of:
preparing a semiconductor substrate having an active area with a high voltage device area and a low voltage device area and an inactive area;
forming a nitride layer pattern on the semiconductor substrate to expose a portion corresponding to the inactive area;
etching a portion of the nitride layer pattern at the inactive area such that the portion of nitride layer pattern has an interior angle less than 90° relative to the top surface of the device;
forming a trench in the exposed semiconductor substrate using the etched nitride layer pattern;
forming the device isolation layer in the trench as the etched nitride layer pattern remains on the substrate; and
forming a gate oxide layer on the high voltage device area of the semiconductor substrate to have a uniform thickness.
4. The method of claim 3 , wherein the device isolation layer is formed projecting from a top surface of the semiconductor substrate, and wherein a lateral side of the projected portion has an exterior angle greater than 90° relative the top surface of the semiconductor substrate.