Process of forming an electronic device including a semiconductor island over an insulating layer
View Patent ↗A process of forming an electronic device can include forming a patterned oxidation-resistant layer over a semiconductor layer that overlies a substrate, and patterning the semiconductor layer to form a semiconductor island. The semiconductor island includes a first surface and a second surface opposite the first surface, and the first surface lies closer to the substrate, as compared to the second surface. The process can also include forming an oxidation-resistant material along a side of the semiconductor island or selectively depositing a semiconductor material along a side of the semiconductor island. The process can further include exposing the patterned oxidation-resistant layer and the semiconductor island to an oxygen-containing ambient, wherein a first portion of the semiconductor island along the first surface is oxidized during exposing the patterned oxidation-resistant layer, the semiconductor island, and the oxidation-resistant material to an oxygen-containing ambient.
1. A process of forming an electronic device comprising:
forming a first patterned oxidation-resistant layer over a semiconductor layer,
wherein the semiconductor layer overlies an insulating layer that overlies a base layer;
patterning the semiconductor layer to form a first semiconductor island, wherein:
the first semiconductor island includes a first surface and a second surface opposite the first surface;
substantially all of the first semiconductor island and abuts and overlies the insulating layer;
the first surface lies closer to the base layer, as compared to the second surface; and
the second surface is spaced apart from the insulating layer;
forming an oxidation-resistant material along a side of the first semiconductor island; and
exposing the first patterned oxidation-resistant layer, the first semiconductor island, and the oxidation-resistant material to a first oxygen-containing ambient, wherein a first portion of the first semiconductor island along the first surface is oxidized during exposing the first patterned oxidation-resistant layer, the first semiconductor island, and the oxidation-resistant material to the first oxygen-containing ambient.
2. The process of claim 1 , further comprising removing the first patterned oxidation-resistant layer after exposing the first patterned oxidation-resistant layer, the first semiconductor island, and the oxidation-resistant material to the first oxygen-containing ambient.
3. The process of claim 2 , further comprising removing the oxidation-resistant material after exposing the first patterned oxidation-resistant layer, the first semiconductor island, and the oxidation-resistant material to the first oxygen-containing ambient.
4. The process of claim 1 , wherein the first patterned oxidation-resistant layer and the oxidation-resistant material comprise a nitride.
5. The process of claim 1 , wherein exposing the first patterned oxidation-resistant layer, the first semiconductor island, and the oxidation-resistant material to the first oxygen-containing ambient is performed at a temperature of at least approximately 800° C.
6. The process of claim 1 , wherein exposing the first patterned oxidation-resistant layer, the first semiconductor island, and the oxidation-resistant material to the first oxygen-containing ambient is performed, such that the first portion of the first semiconductor island lies along substantially all of the first surface.
7. The process of claim 1 , wherein exposing the first patterned oxidation-resistant layer, the first semiconductor island, and the oxdation-resistant material to the first oxygen-containing ambient is performed, such that a thickness of the first semiconductor island, as measured in a direction substantially perpendicular to a primary surface of the base layer, is reduced.
8. The process of claim 7 , wherein:
patterning the semiconductor layer also forms a second semiconductor island, wherein:
the second semiconductor island includes a third surface and a fourth surface opposite the third surface; and
the third surface lies closer to the base layer, as compared to the fourth surface; and
exposing the first patterned oxidation-resistant layer, the first semiconductor island, and the oxidation-resistant material to first oxygen-containing ambient is performed, such that:
a second portion of the second semiconductor island lying along the third surface is oxidized; and
the second portion of the second semiconductor island lies along part, but not all, of the third surface.
9. The process of claim 1 , wherein:
patterning the semiconductor layer also forms a second semiconductor island including a third surface and a fourth surface opposite the third surface, wherein:
substantially all the second semi conductor island abuts and overlies the insulating item:
the third surface lies closer to the base layer, as compared to the fourth surface; and
the fourth surface is spaced apart from the insulating layer;
the process further comprises:
forming a second patterned oxidation-resistant layer that overlies the second semiconductor island, but does not overlie the first semiconductor island; and
exposing the second patterned oxidation-resistant layer, the first semiconductor island, and parts of the first patterned oxidation-resistant layer and the oxidation-resistant material to a second oxygen-containing ambient, wherein another portion of the first semiconductor island adjacent to the insulating layer is oxidized but the second semiconductor island is not significantly oxidized.
10. The process of claim 8 , wherein after exposing the first patterned oxidation-resistant layer, the first semiconductor island, and the oxidation-resistant material to the first oxygen-containing ambient, the second surface of the first semiconductor island and the fourth surface of the second semiconductor island lie at substantially a same elevation.
11. A process of forming an electronic device comprising:
forming a patterned oxidation-resistant layer over a semiconductor layer that overlies a substrate;
patterning the semiconductor layer to form a first semiconductor island, wherein:
the first semiconductor island includes a first surface and a second surface opposite the first surface; and
the first surface lies closer to the substrate, as compared to the second surface;
selectively depositing a semiconductor material along a side of the first semiconductor island; and
exposing the patterned oxidation-resistant layer, the first semiconductor island, and the semiconductor material to an oxygen-containing ambient, wherein a first portion of the first semiconductor island along the first surface is oxidized during exposing the patterned oxidation-resistant layer, the first semiconductor island, and the oxidation-resistant material to an oxygen-containing ambient.
12. The process of claim 11 , wherein selectively depositing comprises epitaxially growing a silicon layer at the side of the first semiconductor island.
13. The process of claim 11 , wherein selectively depositing comprises epitaxially growing a silicon-germanium layer at the side of the first semiconductor island.
14. The process of claim 13 , wherein during exposing the patterned oxidation-resistant layer, the first semiconductor island, and the semiconductor material to an oxygen-containing ambient, germanium from the silicon-germanium layer migrates into the first semiconductor island.
15. The process of claim 11 , wherein exposing the patterned oxidation-resistant layer, the first semiconductor island, and the semiconductor material to an oxygen-containing ambient is performed at a temperature of at least approximately 800° C.
16. The process of claim 11 , wherein exposing the patterned oxidation-resistant layer, the first semiconductor island, and the semiconductor material to an oxygen-containing ambient is performed, such that the first portion of the first semiconductor island lies along substantially all of the first surface.
17. The process of claim 16 , wherein patterning the semiconductor layer is performed such that the first semiconductor island has a lateral dimension no greater than approximately one micron.
18. The process of claim 17 , wherein the second surface of the first semiconductor island is not significantly oxidized during exposing the patterned oxidation-resistant layer, the first semiconductor island, and the semiconductor material to an oxygen-containing ambient.
19. The process of claim 17 , wherein:
patterning the semiconductor layer also forms a second semiconductor island, wherein:
the second semiconductor island includes a third surface and a fourth surface opposite the third surface; and
the third surface lies closer to the substrate, as compared to the fourth surface; and
exposing the patterned oxidation-resistant layer; the first semiconductor island, and the semiconductor material to an oxygen-containing ambient is performed, such that:
a second portion of the second semiconductor island lying along the third surface is oxidized; and
the second portion of the second semiconductor island lies along part, but not all, of the third surface.
20. The process of claim 19 , wherein patterning the semiconductor layer is performed such that the second semiconductor island does not have a lateral dimension of less than approximately one micron.