Semiconductor device and method of manufacturing the same
View Patent ↗Disclosed is a semiconductor device in which emitter pad electrodes connected to an active region, collector and base pad electrodes are formed on a surface of a semiconductor substrate. Furthermore, on a back surface of the semiconductor substrate, a backside electrode is formed. Moreover, the emitter pad electrodes connected to a grounding potential are connected to the backside electrode through feedthrough electrodes penetrating the semiconductor substrate in a thickness direction.
1. A semiconductor device, comprising:
a semiconductor substrate including a front surface, a back surface and four lateral faces, which connect a periphery of the front surface and a periphery of the back surface;
a diffusion region in the semiconductor substrate;
a pad electrode on the front surface of the semiconductor substrate, which is electrically connected to the diffusion region;
a backside electrode on the back surface of the semiconductor substrate;
a through-hole penetrating through the semiconductor substrate and located under the pad electrode;
a feedthrough electrode, which electrically connects the pad electrode and the backside electrode through the semiconductor substrate and which is formed of a conductive material covering an inner wall of the through-hole or filled in the through-hole, and wherein
the diffusion region is surrounded by an isolation region;
the pad electrode is outside of the isolation region; and
the diffusion region and the pad electrode are connected through a wiring.
2. The semiconductor device according to claim 1 , wherein the diffusion region is a first region for passing through principal current, a second region for passing through principal current, or a control region for passing through a control signal.
3. The semiconductor device according to claim 1 , including two feedthrough electrodes that correspond to two pad electrodes and the two feedthrough electrodes are connected to the backside electrode.
4. The semiconductor device according to claim 1 , wherein the diffusion region is connected through a plurality of pad electrodes and feedthrough electrodes to the backside electrode, which is grounded.
5. The semiconductor device according to claim 1 , wherein the diffusion region is a diffusion region of a transistor, a diode, an IC, or a LSI.