Vertical MOSFET transistor, in particular operating as a selector in nonvolatile memory devices
View Patent ↗A vertical MOSFET transistor is formed in a body of semiconductor material having a surface. The transistor includes a buried conductive region of a first conductivity type; a channel region of a second conductivity type, arranged on top of the buried conductive region; a surface conductive region of the first conductivity type, arranged on top of the channel region and the buried conductive region; a gate insulation region, extending at the sides of and contiguous to the channel region; and a gate region extending at the sides of and contiguous to the gate insulation region.
1. A memory, comprising:
a plurality of memory elements; and
a respective plurality of selection elements arranged in a plurality of rows parallel to a source line and a plurality of columns parallel to a bit line that is perpendicular to the source line, each selection element being formed by a vertical MOSFET transistor that includes:
a body of semiconductor material having a surface;
a buried conductive region of a first conductivity type positioned in the body;
a channel region in the body, said channel region having a top and a bottom, said bottom completely on said buried conductive region;
a surface conductive region of said first conductivity type, arranged on top of said channel region and said buried conductive region;
a gate insulation region extending at sides of and contiguous to said channel region; and
a gate region extending at sides of and contiguous to said gate insulation region;
wherein said buried conductive region is shared by a plurality of said selection elements in a row of said plurality of rows parallel to the source line, and wherein said gate insulation region completely laterally surrounds said channel region, and said gate region completely laterally surrounds said gate insulation region.
2. The memory according to claim 1 , wherein each memory element is arranged on top of and in electrical contact with said surface conductive region of a respective one of the selection elements.
3. The memory according to claim 1 wherein the memory elements are phase-change memory elements.
4. The memory according to claim 1 , wherein said buried conductive region further extends under said gate region, and said buried conductive region and said gate region being insulated electrically from one another by a dielectric material layer.
5. The memory according to claim 1 , wherein said buried conductive region, said channel region and at least part of said surface conductive region are of monocrystalline material, and at least part of said gate region is of polycrystalline material.
6. A system, comprising:
a controller; and
a memory that includes:
a plurality of memory elements; and
a respective plurality of selection elements arranged in a plurality of rows parallel to a source line and a plurality of columns parallel to a bit line perpendicular to the source line, each selection element being formed by a vertical MOSFET transistor that includes:
a body of semiconductor material having a surface;
a buried conductive region of a first conductivity type positioned in the body;
a channel region in the body, said channel region having a top and a bottom, said bottom completely on said buried conductive region;
a surface conductive region of said first conductivity type, arranged on top of said channel region and said buried conductive region;
a gate insulation region extending at sides of and contiguous to said channel region; and
a gate region extending at sides of and contiguous to said gate insulation region;
wherein said buried conductive region is shared by a plurality of said selection elements in a row of said plurality of rows parallel to the source line, and wherein said gate insulation region completely laterally surrounds said channel region, and said gate region completely laterally surrounds said gate insulation region.
7. The system according to claim 6 , wherein each memory element is arranged on top of and in electrical contact with said surface conductive region of a respective one of the selection elements.
8. The system according to claim 6 , wherein said buried conductive region further extends under said gate region, and said buried conductive region and said gate region being insulated electrically from one another by a dielectric material layer.
9. The system according to claim 6 , wherein said buried conductive region, said channel region and at least part of said surface conductive region are of monocrystalline material, and at least part of said gate region is of polycrystalline material.