Enhanced mechanical strength via contacts
View Patent ↗The present invention provides an enhanced interconnect structure with improved reliability. The inventive interconnect structure has enhanced mechanical strength of via contacts provided by embedded metal liners. The embedded metal liners may be continuous or discontinuous. Discontinuous embedded metal liners are provided by a discontinuous interface at the bottom of the via located within the interlayer dielectric layer.
1. An interconnect structure comprising:
a first dielectric layer having at least one metallic interconnect embedded therein;
a second dielectric layer located atop said first dielectric layer, wherein said second dielectric layer has at least one aperture having an upper line region and a lower via region;
a first liner located atop the vertical and horizontal walls of said at least one aperture and said at least one metallic interconnect;
a first conductive material partially filling said at least one aperture;
a second liner located atop the remaining vertical and horizontal walls of said at least one aperture and said first conductive material, said second liner being discontinuous on said horizontal wall, wherein said second liner partially covers a bottom surface of said lower via region and said second liner is missing in a central area of said bottom surface of said lower via region; and
a second conductive material filling said remaining vertical and horizontal walls of said at least one aperture.
2. The interconnect structure of claim 1 further comprising a third conductive material partially filling said at least one aperture; and
a third liner located atop the remaining vertical and horizontal walls of said at least one aperture and said third conductive material.
3. The interconnect structure of claim 2 further comprising multiple conductive material partially filling said at least one aperture; and
multiple liners embedded in the interconnect structure atop said multiple conductive material partially filling said at least one aperture.