Mask and method for electrokinetic deposition and patterning process on substrates
View Patent ↗A mask for application to a substrate to facilitate electrokinetic deposition of charged particles onto the substrate, the mask comprising a conducting layer, a dielectric layer, and mask openings. A method for applying a pattern of charged particles to a substrate comprising applying the foregoing the substrate to yield a masked substrate; immersing the masked substrate in a bath containing the charged particles; and establishing an electrical potential between the conducting layer of the mask and a counter-electrode thereby electrokinetically depositing the particles through the mask openings onto areas of the substrate exposed in the mask openings. Products made by this method.
1. A method for applying a pattern of charged particles to a substrate comprising:
applying a mask having a conducting layer, a dielectric layer, and mask openings to the substrate with the conducting layer of the mask between the substrate and the dielectric layer to yield a masked substrate having unmasked surfaces defined by the mask openings;
immersing the masked substrate in a bath containing the charged particles; and
establishing an electrical potential between the conducting layer of the mask and a counter-electrode thereby electrokinetically attracting the charged particles to exposed surfaces on the conducting layer in the mask openings to deposit the charged particles in the mask openings.
2. The method of claim 1 wherein the mask openings into which charged particles are deposited include mask openings which define unmasked surfaces which are non-conductive surfaces of the substrate.
3. The method of claim 1 wherein all surfaces of the substrate are non-conductive.
4. The method of claim 1 wherein the charged particles are powder particles having an average size between about 2 and about 100 microns.
5. The method of claim 1 wherein the charged particles have an average size between about 50 and about 500 microns.
6. The method of claim 1 wherein the charged particles have an average size between about 300 microns and about 1 mm.
7. The method of claim 1 wherein the charged particles are Sn-based particles.
8. The method of claim 1 wherein the charged particles are made from materials selected from among the metals and alloys Sn, Sn/Pb, Sn/Ag/Cu, Sn/Ag, Cu, Sn/Ag/Bi, Sn/Bi, and Sn/Pb/Bi.
9. The method of claim 1 wherein the conducting layer has a thickness between about 50 microns and about 1 cm and the dielectric layer has a thickness between about 1 and about 250 microns.
10. A method for applying a pattern of charged particles to a non-conductive substrate comprising:
applying a mask having a conducting layer, a dielectric layer, and mask openings to the substrate to with the conducting layer of the mask between the substrate and the dielectric layer to yield a masked substrate having unmasked surfaces defined by the mask openings;
immersing the masked substrate in a bath containing the charged particles; and
establishing an electrical potential between the conducting layer of the mask and a counter-electrode thereby electrokinetically attracting the charged particles to exposed surfaces on the conducting layer in the mask openings to deposit the charged particles in the mask openings.
11. The method of claim 10 wherein the charged particles are powder particles having an average size between about 2 and about 100 microns.
12. The method of claim 10 wherein the charged particles have an average size between about 50 and about 500 microns.
13. The method of claim 10 wherein the charged particles have an average size between about 300 microns and about 1 mm.
14. The method of claim 10 wherein the charged particles are Sn-based particles.
15. The method of claim 10 wherein the charged particles are made from materials selected from among the metals and alloys Sn, Sn/Pb, Sn/Ag/Cu, Sn/Ag, Cu, Sn/Ag/Bi, Sn/Bi, and Sn/Pb/Bi.
16. A method for applying a pattern of charged particles to a substrate comprising:
applying a mask to the substrate to yield a masked substrate comprising an electrically conducting layer, a dielectric layer adhered to the conducting layer, and mask openings which define a pattern for deposition of the charged particles onto the substrate;
immersing the masked substrate in a bath containing the charged particles; and
establishing an electrical potential between the conducting layer of the mask and a counter-electrode thereby electrokinetically depositing the particles through the mask openings onto areas of the substrate exposed in said mask openings.