Providing stress uniformity in a semiconductor device
View Patent ↗A method includes forming a plurality of functional features on a semiconductor layer in a first region. A non-functional feature corresponding to the functional feature is formed adjacent at least one of the functional features disposed on a periphery of the region. A stress-inducing layer is formed over at least a portion of the functional features and the non-functional feature. A device includes a semiconductor layer, a first dummy gate electrode, and a stress-inducing layer. The plurality of transistor gate electrodes is formed above the semiconductor layer. The plurality includes at least a first end gate electrode, a second end gate electrode, and at least one interior gate electrode. The first dummy gate electrode is disposed proximate the first end gate electrode. The stress-inducing layer is disposed over at least a portion of the plurality of transistor gate electrodes and the first dummy gate electrode.
1. A method, comprising:
forming a plurality of functional features on a semiconductor layer in a first region;
forming a non-functional feature corresponding to the functional feature adjacent at least one of the functional features disposed on a periphery of the region;
forming a stress-inducing layer proximate at least a portion of the functional features and the non-functional feature.
2. The method of claim 1 , wherein forming the stress-inducing layer further comprising forming the stress-inducing layer to exert at least one of a tensile stress and a compressive stress on the functional features.
3. The method of claim 1 , wherein the functional features comprise transistor gate electrodes.
4. The method of claim 3 , wherein the non-functional feature comprises a dummy gate electrode.
5. The method of claim 4 , wherein the transistor gate electrode and dummy gate electrode are formed of the same material.
6. The method of claim 1 , further comprising forming the non-functional feature above the semiconductor layer.
7. The method of claim 1 , further comprising:
forming an isolation structure in the semiconductor layer adjacent the first region; and
forming the non-functional feature above the isolation structure.
8. The method of claim 1 , wherein forming the stress-inducing layer further comprises forming a conformal stress-inducing layer over the functional features and the non-functional feature.
9. The method of claim 8 , wherein the conformal stress-inducing layer comprises a dielectric layer.
10. The method of claim 1 , wherein forming the stress-inducing layer further comprises:
removing a portion of the semiconductor layer proximate each of the functional features and the non-functional feature to define a plurality of recesses; and
forming the stress-inducing layer to fill at least a portion of the recesses.
11. The method of claim 10 , wherein forming the stress-inducing layer further comprises epitaxially growing the stress-inducing layer.
12. The method of claim 11 , wherein the epitaxially grown stress-inducing layer comprises at least one component forming a crystal lattice having a lattice constant that differs from that of the semiconductor layer.
13. The method of claim 11 , wherein the semiconductor layer comprises a silicon layer, and the epitaxially grown stress-inducing layer comprises silicon and at least one of germanium and carbon.
14. A method, comprising:
forming a plurality of transistor gate electrodes above a semiconductor layer, the plurality including at least a first end gate electrode, a second end gate electrode, and at least one interior gate electrode;
forming a first dummy gate electrode proximate the first end gate electrode; and
forming a stress-inducing layer proximate at least a portion of the plurality of transistor gate electrodes and the first and second dummy gate electrodes.
15. The method of claim 14 , further comprising forming a second dummy gate electrode proximate the second end gate electrode, wherein forming the stress-inducing layer further comprises forming the stress-inducing layer over at least a portion of the second dummy gate electrode.
16. The method of claim 14 , wherein the plurality of transistor gate electrodes has an associated pattern density, and forming the first and second dummy gate electrodes comprises spacing the first dummy gate electrodes from the first end gate electrode to maintain the pattern density.
17. The method of claim 14 , wherein forming the stress-inducing layer further comprising forming the stress-inducing layer to exert at least one of a compressive stress and a tensile stress on channel regions defined below each of the plurality of transistor gate electrodes.
18. The method of claim 14 , wherein the plurality of transistor gate electrodes and the first dummy gate electrode are formed of the same material.
19. The method of claim 14 , further comprising forming the first dummy gate electrode above the semiconductor layer.
20. The method of claim 14 , further comprising:
forming at least one isolation structure in the semiconductor layer adjacent the first end gate electrode; and
forming the first dummy gate electrode above the isolation structure.
21. The method of claim 14 , wherein forming the stress-inducing layer further comprises forming a conformal stress-inducing layer over the plurality of transistor gate electrodes and the first dummy gate electrode.
22. The method of claim 21 , wherein the conformal stress-inducing layer comprises a dielectric layer.
23. The method of claim 14 , wherein forming the stress-inducing layer further comprises:
removing a portion of the semiconductor layer proximate each of the transistor gate electrodes and the first dummy gate electrode to define a plurality of recesses; and
forming the stress-inducing layer to fill at least a portion of the recesses.
24. The method of claim 23 , wherein forming the stress-inducing layer further comprises epitaxially growing the stress-inducing layer.
25. The method of claim 24 , wherein the epitaxially grown stress-inducing layer comprises at least one component forming a crystal lattice having a lattice constant that differs from that of the semiconductor layer.
26. The method of claim 24 , wherein the semiconductor layer comprises a silicon layer, and the epitaxially grown stress-inducing layer comprises silicon and at least one of germanium and carbon.
27. A device, comprising:
a semiconductor layer;
a plurality of transistor gate electrodes formed above the semiconductor layer, the plurality including at least a first end gate electrode, a second end gate electrode, and at least one interior gate electrode;
a first dummy gate electrode disposed proximate the first end gate electrode; and
a stress-inducing layer disposed proximate at least a portion of the plurality of transistor gate electrodes and the first dummy gate electrode.
28. The device of claim 27 , further comprising a second dummy gate electrode disposed proximate the second end gate electrode, wherein the stress-inducing layer is disposed over at least a portion of the second dummy gate electrode.
29. The device of claim 27 , wherein the stress-inducing layer comprises a conformal layer.
30. The device of claim 27 , wherein the stress-inducing layer is disposed in a plurality of recesses defined in the semiconductor layer adjacent the transistor gate electrodes and the first dummy gate electrode.
31. The device of claim 27 , wherein the stress-inducing layer exerts at least one of a compressive stress and a tensile stress on channel regions defined below each of the plurality of transistor gate electrodes.