Electronic devices including offset conductive bumps
View Patent ↗Bumping a substrate having a metal layer thereon may include forming a barrier layer on the substrate including the metal layer and forming a conductive bump on the barrier layer. Moreover, the barrier layer may be between the conductive bump and the substrate, and the conductive bump may be laterally offset from the metal layer. After forming the conductive bump, the barrier layer may be removed from the metal layer thereby exposing the metal layer while maintaining a portion of the barrier layer between the conductive bump and the substrate. Related structures are also discussed.
1. An electronic device comprising:
a first substrate including a metal layer comprising aluminum on the first substrate;
a barrier layer on the first substrate offset from the metal layer comprising aluminum;
a conductive bump on the barrier layer wherein the barrier layer is between the conductive bump and the first substrate, wherein the conductive bump is offset from the metal layer comprising aluminum, and wherein the barrier layer, the conductive bump, and the metal layer comprising aluminum all comprise different conductive materials;
a second substrate bonded to the conductive bump so that the conductive bump is between the first and second substrates; and
a wirebond on the metal layer comprising aluminum wherein the metal layer comprising aluminum is free of the conductive material of the barrier layer thereon;
wherein the conductive bump comprises at least one of solder, gold, and/or copper, wherein the barrier layer comprises titanium tungsten, and wherein the metal layer comprising aluminum is free of titanium tungsten thereon so that a portion of the first substrate is free of titanium tungsten between the substrate and the wirebond.
2. An electronic device according to claim 1 wherein the electronic device comprises an integrated circuit device, and wherein the first substrate comprises an integrated circuit substrate.
3. An electronic device according to claim 1 further comprising a conductive under bump metallurgy layer between the barrier layer and the conductive bump.
4. An electronic device according to claim 1 further comprising:
an input/output pad on the first substrate wherein the barrier layer and the conductive bump are electrically connected to the input/output pad.
5. An electronic device according to claim 4 wherein the input/output pad and the metal layer each comprise aluminum.
6. An electronic device according to claim 4 wherein the conductive bump is on the barrier layer opposite the input/output pad.
7. An electronic device according to claim 4 wherein the conductive bump is offset from the input/output pad.
8. An electronic device according to claim 2 further comprising:
an under bump metallurgy layer between the barrier layer and the conductive bump wherein the under bump metallurgy layer and the barrier layer comprise different materials.
9. An electronic device according to claim 1 further comprising:
an insulating passivation layer on the first substrate and on edge portions of the metal layer comprising aluminum opposite the substrate wherein the insulating passivation layer has an opening therethrough exposing a central portion of the metal layer comprising aluminum, wherein the barrier layer is on portions of the insulating passivation layer, wherein the barrier layer is offset from the opening through the insulating passivation layer, and wherein the conductive bump is offset from the opening through the insulating passivation layer.
10. An electronic device according to claim 9 wherein the wirebond is provided directly on the central portion of the metal layer comprising aluminum.
11. An electronic device comprising:
a first substrate including a metal layer comprising aluminum on the first substrate;
an insulating passivation layer on the first substrate and on edge portions of the metal layer comprising aluminum opposite the substrate wherein the insulating passivation layer has an opening therethrough exposing a central portion of the metal layer comprising aluminum;
a barrier layer comprising titanium tungsten on the first substrate offset from the metal layer comprising aluminum wherein the barrier layer is on portions of the insulating passivation layer opposite the substrate and wherein the barrier layer is offset from the opening through the insulating passivation layer;
a conductive bump on the barrier layer wherein the barrier layer is between the conductive bump and the first substrate, wherein the conductive bump is offset from the metal layer comprising aluminum, wherein the conductive bump is offset from the opening through the insulating passivation layer, wherein the barrier layer, the conductive bump, and the metal layer comprising aluminum all comprise different conductive materials, and wherein the conductive bump comprises at least one of solder, gold, and/or copper;
a second substrate bonded to the conductive bump so that the conductive bump is between the first and second substrates; and
a wirebond on the metal layer comprising aluminum wherein the wirebond is on the central portion of the metal layer comprising aluminum exposed through the opening through the passivation layer and wherein the metal layer comprising aluminum is free of titanium tungsten thereon between the metal layer comprising aluminum and the wirebond.
12. An electronic device according to claim 11 wherein the wirebond is provided directly on the central portion of the metal layer comprising aluminum.
13. An electronic device according to claim 11 wherein the electronic device comprises an integrated circuit device, and wherein the first substrate comprises an integrated circuit substrate.
14. An electronic device according to claim 13 further comprising:
an under bump metallurgy layer between the barrier layer and the conductive bump wherein the under bump metallurgy layer and the barrier layer comprise different materials.
15. An electronic device according to claim 11 further comprising a conductive under bump metallurgy layer between the barrier layer and the conductive bump.
16. An electronic device according to claim 11 further comprising:
an input/output pad on the first substrate wherein a central portion of the input/output pad is exposed through a second opening through the insulating passivation layer, wherein edge portions of the input/output pad are between the insulating passivation layer and the first substrate, and wherein the barrier layer and the conductive bump are electrically connected to the input/output pad through the second opening through the insulating passivation layer.
17. An electronic device according to claim 16 wherein the input/output pad and the metal layer each comprise aluminum.
18. An electronic device according to claim 16 wherein the conductive bump is on the barrier layer opposite the input/output pad.
19. An electronic device according to claim 16 wherein the conductive bump is offset from the input/output pad.