System for and method for closed loop electrophoretic deposition of phosphor materials on semiconductor devices
View Patent ↗One close loop system and method for electrophoretic deposition (EPD) of phosphor material on light emitting diodes (LEDs). The system comprises a deposition chamber sealed from ambient air. A mixture of phosphor material and solution is provided to the chamber with the mixture also being sealed from ambient air. A carrier holds a batch of LEDs in the chamber with the mixture contacting the areas of the LEDs for phosphor deposition. A voltage supply applies a voltage to the LEDs and the mixture to cause the phosphor material to deposit on the LEDs at the mixture contacting areas.
1. A method for depositing a material on a semiconductor device, comprising:
providing a chamber for holding a semiconductor device, said chamber sealed from ambient air;
providing a mixture of material and solution, said mixture placed in said chamber while being sealed from ambient air;
applying a voltage to said semiconductor device and said mixture to cause said material to deposit on said semiconductor device; and
providing a rinsing liquid, said rinsing liquid placed in said chamber without exposing said rinsing liquid to ambient air, wherein said device remains stationary relative to the chamber while said mixture is provided and throughout the duration of providing said rinsing liquid.
2. The method of claim 1 , wherein said semiconductor device comprises a light emitting diode (LED).
3. The method of claim 1 , wherein said material comprises at least one layer of one or more phosphors.
4. The method of claim 1 , wherein said material comprises at least one layer of one or more substances having light scattering particles.
5. The method of claim 1 , wherein said material has at least one layer of one or more phosphors and at least one layer of one or more substances having light scattering particles.
6. The method of claim 1 , further comprising stirring said mixture prior to placing said mixture in said chamber.
7. The method of claim 1 , further comprising returning said mixture to a first bath without exposing said mixture to ambient air.
8. The method of claim 1 , further comprising allowing said rinsing liquid to exit from said chamber.
9. The method of claim 8 , wherein said rinsing liquid exits said chamber without exposure to ambient air.
10. The method of claim 8 , further comprising filtering said rinsing liquid after exiting said chamber.
11. The method of claim 1 , further comprising providing a gas to said chamber to purge moisture and contaminants from said chamber.
12. The method of claim 11 , further comprising venting said gas from said chamber.
13. The method of claim 1 , wherein said mixture is circulated through a path outside said chamber before entering said chamber.
14. The method of claim 1 , wherein said mixture continuously flows through said chamber while said material deposits on said semiconductor device.
15. The method of claim 1 , wherein said mixture is static in said chamber while said material deposits on said semiconductor device.
16. The method of claim 1 , wherein said mixture is sealed from ambient air and not exposed to ambient air.
17. The method of claim 1 wherein said rinsing liquid is sealed from ambient air and not exposed to ambient air.