Bipolar device having improved capacitance
The invention, in one aspect, provides a semiconductor device that comprises a collector located in a semiconductor substrate and an isolation region located under the collector, wherein a peak dopant concentration of the isolation region is separated from a peak dopant concentration of the collector by at least about 0.9 microns. The invention also provides a method for forming this device.
1. A method of manufacturing a semiconductor device, comprising:
forming a collector in a semiconductor substrate;
forming an isolation region, including separating the isolation region from the collector such that a peak dopant concentration of the collector is separated from a peak dopant concentration of the isolation region by at least about 0.9 microns; and
forming isolation tubs in the semiconductor substrate with a first mask and wherein forming the isolation region includes employing a second mask, wherein the isolation tubs are formed at a first implant energy ranging from about 1 MeV to about 2 MeV, and at a second implant energy ranging from about 2 MeV to about 3 MeV.
2. The method recited in claim 1 , wherein the distance ranges from about 0.9 microns to about 2.0 microns.
3. The method recited in claim 1 , wherein forming the isolation tubs includes forming the isolation tubs with a dopant dosage ranging from about 4E12 atoms/cm 2 to about 2E13 atoms/cm 2 and at an implant energy ranging from about 1.0 MeV to about 2.0 MeV, and wherein forming the isolation region includes forming the isolation region with a dopant dosage ranging from about 4E12 atoms/cm 2 to about 8E12 atoms/cm 2 and at an implant energy ranging from about 2.0 MeV to about 4.0 MeV.
4. The method recited in claim 3 , wherein the isolation region is formed with a doping dosage of about 6E12 atoms/cm 2 and at an implant energy of about 3.2 MeV and the isolation tubs are formed with a doping concentration of about 6E12 atoms/cm 2 and at an implant energy of about 2.0 MeV.
5. The method recited in claim 1 , further including forming isolation tubs and forming the isolation region includes forming the isolation region concurrently with the isolation tubs, and wherein a depth of the isolation tubs and the isolation region is about the same.
6. The method recited in claim 5 , wherein forming the isolation tubs and isolation region includes using an implant energy ranging from about 2.0 MeV to about 4.0 MeV.
7. The method recited in claim 1 , further comprising forming a base in the collector and forming an emitter over the base for a vertical bipolar transistor.
8. The method recited in claim 7 , wherein forming the base and emitter includes forming a plurality of bases and emitter for a plurality of vertical bipolar transistors and wherein the semiconductor device is an integrated circuit and the method further comprises:
forming non-bipolar transistors over the semiconductor substrate;
forming dielectric layers over the non-bipolar transistors and vertical bipolar transistors; and
forming interconnects in the dielectric layers that electrically connect the non-bipolar and vertical bipolar transistors.