Bonding of substrates including metal-dielectric patterns with metal raised above dielectric
View Patent ↗Bonding of substrates including metal-dielectric patterns on a surface with the metal raised above the dielectric is disclosed. One method includes providing a first substrate having a metal-dielectric pattern on a surface thereof; providing a second substrate having a metal-dielectric pattern on a surface thereof; performing a process resulting in the metal being raised above the dielectric; cleaning the metal; and bonding the first substrate to the second substrate. A related structure is also disclosed. The bonding of raised metal provides a strong bonding medium, and good electrical and thermal connections enabling creation of three dimensional integrated structures with enhanced functionality.
1. A method comprising:
providing a first substrate having a metal-dielectric pattern on a surface thereof,
wherein the metal on the first substrate includes a concave upper surface, and
wherein the dielectric on the first substrate includes a substantially uniform upper surface;
providing a second substrate having a metal-dielectric pattern on a surface thereof;
performing a process resulting in the metal being raised above the dielectric on the first substrate,
wherein the performing of the process resulting in the metal being raised above the dielectric on the first substrate further causes the concave upper surface of the metal of the first substrate to have a substantially convex-dome shape;
performing a process resulting in the metal being positioned substantially below the dielectric on the second substrate;
bonding the metal raised above the dielectric on the first substrate to the metal positioned substantially below the dielectric on the second substrate at a temperature less than approximately 400 degrees Celsius,
wherein the bonding forms a seam between the metal on the first substrate and the metal on the second substrate; and
annealing after the bonding to substantially remove the seam.
2. The method of claim 1 , wherein the process resulting in the metal being raised above the dielectric on the first substrate includes recessing the dielectric.
3. The method of claim 2 , wherein the recessing includes performing a diluted hydrofluoric (HF) etch in the case that the dielectric includes silicon dioxide.
4. The method of claim 2 , wherein the recessing includes performing chemical mechanical polishing of the dielectric.
5. The method of claim 2 , wherein the recessing includes performing chemical mechanical polishing of the dielectric, and performing a diluted hydrofluoric (HF) etch in the case that the dielectric includes silicon dioxide.
6. The method of claim 2 , further comprising roughening of the metal prior to the bonding.
7. The method of claim 1 , wherein the process resulting in the metal being raised above the dielectric on the first substrate includes forming a metal cap over the metal.
8. The method of claim 7 , further comprising roughening of the metal prior to the bonding.
9. The method of claim 1 , further comprising roughening of the metal prior to the bonding.
10. The method of claim 1 , further comprising performing a metal surface neutralization process.
11. The method of claim 1 , wherein the bonding includes bonding only the metal on the first substrate and the second substrate.
12. The method of claim 1 , wherein the bonding includes bonding the metal on the first substrate and the metal on the second substrate, and the dielectric on the first substrate and the dielectric on the second substrate.
13. The method of claim 1 , wherein each providing includes performing chemical mechanical polishing.
14. The method of claim 1 , further comprising raising the dielectric of the second substrate.
15. A method comprising:
providing a first substrate having a metal-dielectric pattern on a surface thereof;
providing a second substrate having a metal-dielectric pattern on a surface thereof;
recessing the dielectric on the first substrate by performing chemical mechanical polishing of the dielectric, and performing an etch,
wherein the recessing of the dielectric on the first substrate results in the metal being raised above the dielectric on the first substrate, and
wherein an upper surface of the metal of the first substrate has a substantially convex-dome shape;
raising the dielectric on the second substrate by depositing additional dielectric material to the dielectric on the second substrate,
wherein the raising of the dielectric on the second substrate results in the metal being positioned substantially below the dielectric on the second substrate;
bonding the metal raised above the dielectric on the first substrate to the metal positioned substantially below the dielectric on the second substrate at a temperature less than approximately 400 degrees Celsius,
wherein the bonding forms a seam between the metal on the first substrate and the metal on the second substrate; and
annealing the first substrate and the second substrate after the bonding to substantially remove the seam.
16. The method of claim 15 , wherein the bonding includes bonding only the metal of the first substrate and the second substrate.
17. The method of claim 15 , wherein the bonding includes bonding the dielectric on the first substrate and the dielectric on the second substrate.
18. The method of claim 1 , wherein the metal positioned substantially below the dielectric on the second substrate includes a concave upper surface.