IP Library Granted Patent US 7,812,354
Granted Patent B2
US 7,812,354 · App. 11/567,236 · Granted Oct 12, 2010

Alternative doping for group III nitride LEDs

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Quick Facts
Patent No.
US 7,812,354
App. No.
11/567,236
Granted
Oct 12, 2010
Kind
B2
Abstract

A light emitting diode is disclosed that is formed in the Group III nitride material system. The diode includes respective n-type and p-type layers for current injection and light emission. At least one n-type Group III nitride layer in the diode has dopants selected from the group consisting of elements with a larger atomic radius than silicon and elements with a larger covalent radius than silicon, with germanium and tellurium being exemplary.

Claims (41)

1. In a light emitting diode formed in the Group III nitride material system that includes respective n-type and p-type layers for current injection and light emission; the improvement comprising:

an n-type Group III nitride layer comprising dopants selected from the group consisting of germanium and tellurium; and

said n-type Group III nitride layer doped with germanium or tellurium having a thickness that is between two boundaries:

an upper boundary defined by the maximum thickness at which said n-type Group III nitride layer when doped with germanium or tellurium is pseudomorphic on a defined growth substrate; and

a lower boundary defined by the maximum thickness at which the same n-type Group III nitride layer when doped only with silicon is pseudomorphic on the same defined growth substrate.

2. A light emitting diode according to claim 1 comprising:

a Group III nitride emission layer on said n-type Group III nitride layer; and

a p-type Group III nitride on said Group III nitride emissions layer for providing a p-n junction structure for current injection through the device and generating an emission.

3. A light emitting diode according to claim 1 wherein said n-type Group III nitride layer is selected from the group consisting of gallium nitride, indium nitride, aluminum gallium nitride, and aluminum indium gallium nitride.

4. A light emitting diode according to claim 2 further comprising respective ohmic contacts to said p-type Group III nitride and said n-type Group III nitride layer.

5. A light emitting diode according to claim 4 wherein said n-type Group III nitride layer is supported by a conductive n-type silicon carbide substrate and said ohmic contact to said n-type layer is made to said n-type silicon carbide substrate.

6. A light emitting diode comprising:

a silicon carbide substrate;

a Group III nitride buffer structure on said silicon carbide substrate;

an n-type Group III nitride epitaxial layer on said buffer structure;

a Group III nitride superlattice structure on said n-type Group III nitride epitaxial layer;

said n-type Group III nitride epitaxial layer in said diode being doped with a dopant selected from the group consisting of germanium and tellurium; and

said n-type Group III nitride epitaxial layer doped with germanium or tellurium having a thickness that is between two boundaries:

an upper boundary defined by the maximum thickness at which said n-type Group III nitride epitaxial layer when doped with germanium or tellurium is pseudomorphic on a defined growth substrate; and

a lower boundary defined by the maximum thickness at which the same n-type Group III nitride layer when doped only with silicon is pseudomorphic on the same defined growth substrate.

7. A light emitting diode according to claim 6 wherein said superlattice comprises a series of at least two alternating strained layers of Group III nitride materials.

8. A light emitting diode according to claim 6 wherein said n-type Group III nitride layer comprises gallium nitride.

9. A light emitting diode according to claim 6 wherein said buffer structure includes an n-type layer of aluminum gallium nitride between said substrate and said n-type Group III nitride epitaxial layer.

10. A light emitting diode according to claim 9 wherein said n-type layer of aluminum gallium nitride is doped with germanium or tellurium.

11. A light emitting diode according to claim 10 in which said aluminum gallium nitride buffer layer is graded in its atomic percentage of aluminum between said substrate and said n-type Group III nitride epitaxial layer.

12. A light emitting diode according to claim 6 wherein said buffer structure includes a plurality of discontinuous portions of Group III nitride material for enhancing the structural and electronic transition between said silicon carbide substrate and said n-type Group III nitride epitaxial layer.

13. A light emitting diode according to claim 12 wherein said discontinuous portions comprise gallium nitride dots.

14. A light emitting diode according to claim 6 wherein said buffer structure includes both a graded layer of aluminum gallium nitride and a homogeneous layer of aluminum gallium nitride between said substrate and said n-type Group III nitride epitaxial gallium nitride layer.

15. A light emitting diode according to claim 6 comprising ohmic contacts to said n-type Group III nitride epitaxial layer and said superlattice for injecting current through said diode.

16. A light admitting diode according to claim 15 in a vertical orientation with one of said ohmic contracts on said silicon carbide substrate and the other of said ohmic contacts to said superlattice opposite said substrate.

17. A light emitting diode according to claim 15 comprising two top side ohmic contacts.

18. In a light emitting diode formed in the Group III nitride material system that includes respective n-type and p-type layers for current injection and light emission; the improvement comprising:

an n-type Group III nitride layer that includes silicon and a dopant selected from the group consisting of elements with a larger atomic radius than silicon and elements with a larger covalent radius than silicon; and

said n-type Group III nitride layer having a thickness that is between two boundaries:

an upper boundary defined by the maximum thickness at which said n-type Group III nitride layer is pseudomorphic on a defined growth substrate; and

a lower boundary defined by the maximum thickness at which the same n-type Group III nitride layer when doped only with silicon is pseudomorphic on the same defined growth substrate.

19. A light emitting diode according to claim 18 wherein said group of elements with larger radius comprises germanium and tellurium.

20. A light emitting diode according to claim 18 wherein the relative amount of silicon doping and larger atom doping progressively changes across said n-type Group III nitride layer.

21. A semiconductor device, comprising:

at least one n-type Group III nitride layer that includes silicon and a dopant having at least one characteristic selected from the group consisting of a larger atomic radius than silicon and a larger covalent radius than silicon.

22. A semiconductor device according to claim 21 wherein a relative amount of said silicon and said dopant progressively changes across said at least one Group III nitride layer.

Assignments (6)
CORRECTIVE ASSIGNMENT TO CORRECT THE NAME OF THE ASSIGNEE PREVIOUSLY RECORDED ON REEL 56012 FRAME 200. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jul 9, 2025
From: CREE, INC.
To: CREELED, INC.
Reel/Frame 071874/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 30, 2025
From: CREELED, INC.; PENGUIN SOLUTIONS CORPORATION (DE); SMART EMBEDDED COMPUTING, INC.; SMART HIGH RELIABILITY SOLUTIONS LLC; SMART MODULAR TECHNOLOGIES, INC.; PENGUIN COMPUTING, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 071755/0001 →
RELEASE OF PATENT SECURITY INTEREST RECORDED AT R/F 058983/0001 Recorded Jun 25, 2025
From: CITIZENS BANK, N.A.
To: SMART MODULAR TECHNOLOGIES, INC.; SMART EMBEDDED COMPUTING, INC.; SMART HIGH RELIABILITY SOLUTIONS LLC; CREELED, INC.
Reel/Frame 071725/0207 →
SECURITY INTEREST Recorded Feb 7, 2022
From: SMART MODULAR TECHNOLOGIES, INC.; SMART HIGH RELIABILITY SOLUTIONS, LLC; SMART EMBEDDED COMPUTING, INC.; CREELED, INC.
To: CITIZENS BANK, N.A.
Reel/Frame 058983/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 1, 2021
From: CREE, INC.
To: CREE LED, INC.
Reel/Frame 056012/0200 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 19, 2007
From: EMERSON, DAVID T.
To: CREE, INC.
Reel/Frame 018780/0693 →