Wafer storage container
View Patent ↗The present invention relates to a wafer storage container which contains a semiconductor wafer one by one and provides a technology to effectively reduce adhesion of particles on semiconductor wafer surfaces during the storage of the wafer. A wafer storage container which contains a wafer one by one, includes: a wafer containing member including a domed-shape recess which abuts on a circumferential edge of the wafer and is capable of holding the wafer; and a cover member which is engaged with the wafer containing member and is capable of sealing the wafer containing member; and a wafer rear surface protection member which is formed into a shape substantially same as an opening of the domed-shape recess and comes into contact with an entire rear surface of the wafer placed so that a front surface is directed the domed-shape recess.
1. A wafer storage container for containing a wafer one by one, comprising:
a wafer containing member comprising a domed-shape recess which abuts on a circumferential edge of the wafer and is capable of holding the wafer;
a cover member which is engaged with the wafer containing member and is capable of sealing the wafer containing member;
a wafer rear surface protection member which is formed into a shape substantially the same as an opening of the domed-shape recess and comes into contact with an entire rear surface of the wafer placed so that a front surface is directed to the domed-shape recess; and
a wafer front surface protection member having a shape substantially the same as that of an inner wall of the domed-shape recess, the wafer front surface protection member coming into contact with the domed-shape recess and abutting only on the wafer circumferential edge.
2. The wafer storage container as claimed in claim 1 , further comprising: a retainer member which is disposed between the wafer rear surface protection member and the cover member and pressed by the cover member to press the wafer against the wafer containing member when the wafer containing member and the cover member are engaged with each other.
3. The wafer storage container as claimed in claim 1 , wherein the wafer rear surface protection member has a function as a retainer member which is pressed by the cover member to press the wafer containing member when the wafer containing member and the cover member are engaged with each other.
4. The wafer storage container as claimed in claim 1 , wherein the wafer rear surface protection member is formed of a material which is unlikely to generate particles.
5. The wafer storage container as claimed in claim 1 , wherein the wafer rear surface protection member is formed of a material with a small amount of released gas.
6. The wafer storage container as claimed in claim 4 , wherein the material which is unlikely to generate particles includes any one of polyethylene, polypropylene, polyester, and vinyl chloride.
7. The wafer storage container as claimed in claim 5 , wherein the material with a small amount of released gas includes a fluorine resin film.