Semiconductor chip shape alteration
View Patent ↗The invention is directed to an improved semiconductor chip that reduces crack initiation and propagation into the active area of a semiconductor chip. A semiconductor wafer includes dicing channels that separate semiconductor chips and holes through a portion of a semiconductor chip, which are located at the intersection of the dicing channels. Once diced from the semiconductor wafer, semiconductor chips are created without ninety degree angle corners.
1. A method for creating a semiconductor chip, comprising:
creating a hole in a semiconductor wafer comprising a plurality of rectilinear semiconductor chips separated by dicing channels, such that the hole is created at an intersection of the dicing channels and through a portion of an adjacent semiconductor chip eliminating a substantially ninety degree corner thereof; and,
dicing through the dicing channels at the intersection of the dicing channels.
2. A method as in claim 1 , the creating step comprising at least one of laser drilling, Bosch process deep drilling, photolithography followed by reactive ion etching, and ion milling.
3. A method as in claim 1 , the dicing step comprising at least one of mechanical saw blade dicing and laser dicing.
4. A method as in claim 1 , shape of the hole comprising one of a circle, diamond, octagon, and concave shape.
5. A method as in claim 1 , the dicing step resulting in a semiconductor chip with an absence of substantially ninety degree corners.
6. A method as in claim 1 , the dicing step resulting in a plurality of semiconductor chips with a reduced underfill to hard passivation contact area.