Blind via capture pad structure
View Patent ↗A capture pad structure includes a lower dielectric layer, a capture pad embedded within the lower dielectric layer, the capture pad comprising a plurality of linear segments. To form the capture pad, a focused laser beam is moved linearly to form linear channels in the dielectric layer. These channels are filled with an electrically conductive material to form the capture pad.
1. A capture pad structure comprising:
a first dielectric layer;
a capture pad embedded within the first dielectric layer, the capture pad comprising a plurality of linear segments comprising a first linear segment and a second linear segment in a star configuration;
a second dielectric layer coupled to the first dielectric layer; and
a blind via aperture extending through the second dielectric layer and to the capture pad.
2. The capture pad structure of claim 1 wherein the blind via aperture is defined by a blind via aperture sidewall.
3. The capture pad structure of claim 1 wherein a length of the first linear segment and the second linear segment is greater than a diameter of the blind via aperture.
4. The capture pad structure of claim 1 wherein the first linear segment has a uniform width and wherein the second linear segment has the uniform width.
5. The capture pad structure of claim 4 wherein the first linear segment intersects the second linear segment at a linear segment intersection, the capture pad structure further comprising a trace electrically coupled to the linear segment intersection and thereby to the capture pad, the trace having the uniform width.
6. The capture pad structure of claim 5 wherein the trace is embedded in the first dielectric layer.
7. The capture pad structure of claim 1 wherein the first linear segment is substantially perpendicular to the second linear segment.
8. The capture pad structure of claim 1 wherein the capture pad comprises:
a first surface coplanar with a principal surface of the first dielectric layer;
a second surface within the first dielectric layer; and
sidewalls extending between the first surface of the capture pad and the second surface of the capture pad.
9. The capture pad structure of claim 8 wherein the blind via aperture extends into the first dielectric layer around the capture pad.
10. The capture pad structure of claim 9 wherein a portion of the sidewalls of the capture pad is exposed by the blind via aperture.
11. The capture pad structure of claim 10 further comprising an electrically conductive blind via within the blind via aperture, the blind via contacting the portion of the sidewalls.
12. The capture pad structure of claim 1 further comprising an electrically conductive blind via within the blind via aperture.
13. The capture pad structure of claim 12 wherein the blind via is a hollow via.
14. The capture pad structure of claim 12 wherein the blind via is a multi-layer via comprising a hollow blind via and a hollow via filling.
15. The capture pad structure of claim 12 wherein the blind via completely fills the blind via aperture.
16. A capture pad structure comprising:
a first dielectric layer;
a capture pad embedded within the first dielectric layer, the capture pad comprising:
a plurality of linear segments;
a first surface coplanar with a principal surface of the first dielectric layer;
a second surface within the first dielectric layer; and
sidewalls extending between the first surface of the capture pad and the second surface of the capture pad;
a second dielectric layer coupled to the first dielectric layer;
a blind via aperture extend through the second dielectric layer and into the first dielectric layer around the capture pad, wherein a portion of the sidewalls of the capture pad is exposed by the blind via aperture; and
an electrically conductive blind via within the blind via aperture, an interlocking structure of the blind via contacting the portion of the sidewalls.
17. A capture pad structure comprising:
a plurality of linear channels in a first dielectric layer;
a capture pad embedded within the first dielectric layer formed of an electrically conductive material filling the linear channels, wherein the capture pad comprises:
a first surface coplanar with a principal surface of the first dielectric layer;
a second surface within the first dielectric layer; and
sidewalls extending between the first surface of the capture pad and the second surface of the capture pad;
a second dielectric layer mounted to the first dielectric layer;
a blind via aperture extending through the second dielectric layer and to the capture pad; and
a blind via in the blind via aperture, the blind via being electrically coupled to the capture pad, wherein the blind via contacts the sidewalls.
18. The capture pad structure of claim 17 wherein the blind via comprise an interlocking structure extending around the capture pad.