Core-shell nanowire transistor
View Patent ↗A semiconductor structure is provided, which includes multiple sections arranged along a longitudinal axis. Preferably, the semiconductor structure comprises a middle section and two terminal sections located at opposite ends of the middle section. A semiconductor core having a first dopant concentration preferably extends along the longitudinal axis through the middle section and the two terminal sections. A semiconductor shell having a second, higher dopant concentration preferably encircles a portion of the semiconductor core at the two terminal sections, but not at the middle section, of the semiconductor structure. It is particularly preferred that the semiconductor structure is a nanostructure having a cross-sectional dimension of not more than 100 nm.
1. A semiconductor structure comprising a middle section and two terminal sections arranged along a longitudinal axis of said semiconductor structure, the two terminal sections located at opposite ends of the middle section, wherein a semiconductor core extends through the middle section and two terminal sections of the semiconductor structure, and wherein a semiconductor shell having a substantially cylindrical outer surface is in direct contact with an entire perimeter of the semiconductor core at the two terminal sections of the semiconductor structure, but not at the middle section of the semiconductor structure where the semiconductor core is exposed, wherein the semiconductor core has a first dopant concentration extends along the longitudinal axis through the multiple sections of the semiconductor structure, and wherein the semiconductor shell having a second, higher dopant concentration encircles a portion of the semiconductor core at one or more, but not all, sections of the semiconductor structure, wherein the first dopant concentration and the second, higher dopant concentration is either a p-type or n-type dopant, wherein the first dopant concentration ranges from 10 11 to 10 17 atoms/cm 3 , and wherein the second, higher dopant concentration ranges from 10 17 to 10 21 atoms/cm 3 .
2. The semiconductor structure of claim 1 , which is a nanostructure having a cross-sectional dimension of not more than about 100 nm.
3. The semiconductor structure of claim 1 , wherein both the semiconductor core and the semiconductor shell comprise the same semiconductor material.
4. The semiconductor structure of claim 1 , wherein the semiconductor shell and the semiconductor core are comprised of at least one of Si, SiC, SiGe, SiGeC, Ge alloys, GaAs, InAs, InP, III-V compound semiconductors, II-VI compound semiconductors or a combination thereof.
5. The semiconductor structure of claim 1 , wherein the semiconductor structure is present on a substrate.
6. The semiconductor structure of claim 5 , wherein the substrate comprises a semiconductor material selected from the group consisting of Si, SiC, SiGe, SiGeC, Ge alloys, GaAs, InAs, InP, III-V compound semiconductors, II-VI compound semiconductors and a combination thereof.
7. The semiconductor structure of claim 6 wherein the substrate comprises an organic semiconductor substrate, a Si/SiGe layered semiconductor substrate, a silicon-on-insulator (SOI) substrate, a SiGe-on-insulator (SGOI) substrate or a combination thereof.
8. The semiconductor structure of claim 1 , wherein the semiconductor structure has a cross-sectional dimension that is no greater than 100 nm.