Cleaning compositions for microelectronic substrates
View Patent ↗A stripping and cleaning composition for cleaning microelectronics substrates, the composition comprising: at least one organic stripping solvent, at least one nucleophilic amine, at least one non-nitrogen containing weak acid in an amount sufficient to neutralize from about 3% to about 75% by weight of the nucleophilic amine such that the stripping composition has an aqueous pH of from about 9.6 to about 10.9, said weak acid having a pK value in aqueous solution of 2.0 or greater and an equivalent weight of less than 140, at least one metal-removing compound selected from the group consisting of diethylene glycol and diethylene glycolamine, and water, and method for cleaning microelectronic substrates with these compositions.
1. A stripping and cleaning composition for cleaning microelectronics substrates, the composition consisting of:
about 20 to about 80 wt % of the composition of N-methyl pyrrolidone, monoethanolamine in an amount of from about 10% to about 45% based on the weight of the composition, from about 5% to about 15% by weight of the composition of diethylene glycol as a metal removing compound, catechol in an amount sufficient to neutralize from about 3% to about 75% by weight of the monoethanolamine such that the stripping composition has an aqueous pH of from about 9.6 to about 10.9, and water.
2. A composition according to claim 1 wherein the composition has from about 0.5 to about 10 wt % of catechol, and from about 0.5 to about 50 wt % of water.
3. A method for cleaning microelectronic substrates without producing any substantial metal corrosion, the substrate containing at least one of photoresist polymeric material, etch residues and metal residues, the process comprising contacting the substrate with a cleaning composition for a time sufficient to clean the substrate, wherein the cleaning composition consists of:
from about 20 to about 80 wt % of the composition of N-methyl pyrrolidone, monoethanolamine in an amount of from about 10% to about 45% based on the weight of the composition, from about 5% to about 15% by weight of the composition of diethylene glycol as a metal removing compound, catechol in an amount sufficient to neutralize from about 3% to about 75% by weight of the monoethanolamine such that the stripping composition has an aqueous pH of from about 9.6 to about 10.9, and water.
4. A method according to claim 3 wherein the composition has from about 0.5 to about 10 wt % of catechol, and from about 0.5 to about 50 wt % of water.
5. A method according to claim 3 wherein the substrate comprises an aluminum metallized substrate having vias and containing metal residue.
6. A method according to claim 5 wherein the metal residue is at least one layer selected from the group consisting of titanium and titanium nitride layers.