Attaching device and attaching apparatus for supporting plate, and attaching method for supporting plate
An attaching device which makes it possible to accurately perform alignment when the diameters of a substrate and a supporting plate are substantially the same includes a mounting plate for mounting a semiconductor wafer thereon, a pressing plate for pressing a supporting plate onto the semiconductor wafer, and a pair of alignment members. The pair of alignment members are arranged to freely move back and forth in a horizontal direction, and blades for supporting a lower surface of the periphery of the supporting plate and pushing members for performing positioning in a state where the supporting plate is superposed on the semiconductor wafer are provided at tip ends of the alignment members.
1. An attaching device for attaching a supporting plate to a surface of a substrate with an adhesive comprising: a mounting plate for mounting a substrate thereon; a pressing plate for pressing a supporting plate onto a substrate with adhesive between the substrate and the supporting plate; and a pair of alignment members, wherein the pair of alignment members are arranged to freely move back and forth in a horizontal direction, and blades for supporting a lower surface of the periphery of the supporting plate and pushing members for performing positioning in a state where the supporting plate is superposed on the substrate are provided at the tip ends of the alignment members, wherein each of said pushing members includes a pair of rollers, and a thickness of the rollers is larger than a combined thickness of the substrate and the adhesive, wherein the blades exclusively support the supporting plate before the supporting plate is adhesively bonded to the substrate; wherein the mounting plate and the pressing plate are located within a chamber which is connected to a vacuum source, and the alignment members are arranged to move back and forth by penetrating the side walls of the chamber.
2. The attaching device according to claim 1 , wherein the mounting plate has a temperature-adjusting mechanism.
3. The attaching device according to claim 1 , wherein the pressing plate has a temperature-adjusting mechanism.
4. The attaching device according to claim 1 , wherein a supporting pin for supporting the substrate is provided so as to move up and down with respect to the top surface of the mounting plate through a vertical penetrating hole formed in the mounting plate.
5. An attaching apparatus for attaching a supporting plate to a surface of a substrate with an adhesive, comprising:
a transfer robot;
cassettes for storing an untreated substrate and a supporting plate;
an applying device which applies a treatment liquid to a surface of the substrate on which a circuit is formed;
a heat treatment device which heats a coating film;
a cooling device which cools the coating film;
a positioning device which positions a substrate and a supporting plate; and
the attaching device of claim 1 ,
the cassettes, the applying device, the heat treatment device, the cooling device, the positioning device, the attaching device being provided so as to surround the transfer robot.
6. The attaching apparatus according to claim 5 , wherein the mounting plate and the pressing plate are located within a chamber which is connected to a vacuum source, and the alignment members are arranged to move back and forth by penetrating the side walls of the chamber.
7. The attaching apparatus according to claim 5 , wherein the mounting plate has a temperature-adjusting mechanism.
8. The attaching apparatus according to claim 5 , wherein the pressing plate has a temperature-adjusting mechanism.
9. The attaching apparatus according to claim 5 , wherein a supporting pin for supporting the substrate is provided so as to move up and down with respect to the top surface of the mounting plate through a vertical penetrating hole formed in the mounting plate.
10. The attaching device according to claim 1 , wherein the pushing members are also disposed at the tip ends of the pushing members but at a different vertical level than the blades, and the pushing members do not engage the supporting plate when the supporting plate is supported by the blades.
11. The attaching device according to claim 1 , further comprising a mechanism for vertically moving the substrate relative to the alignment members.
12. The attaching device according to claim 1 , wherein the pushing members perform positioning of the substrate and the supporting plate when the supporting plate is not supported by the blades.
13. The attaching apparatus according to claim 5 , wherein the pushing members are also disposed at the tip ends of the pushing members but at a different vertical level than the blades, and the pushing members do not engage the supporting plate when the supporting plate is supported by the blades.
14. The attaching apparatus according to claim 5 , wherein the pushing members perform positioning of the substrate and the supporting plate when the supporting plate is not supported by the blades.