Semiconductor device and method of manufacturing the same
View Patent ↗The present invention provides a semiconductor device that includes: stacked semiconductor chips, each semiconductor chip including a semiconductor substrate and a first insulating layer that is provided on side faces of the semiconductor substrate and has concavities formed on side faces thereof; first metal layers that are provided in center portions of inner side faces of the concavities; and second metal layers that are provided in the concavities and are connected to the first metal layers formed on each semiconductor chip. The present invention also provides a method of manufacturing the semiconductor device.
1. A semiconductor device comprising:
a plurality of stacked semiconductor chips, at least one of the semiconductor chips including a semiconductor substrate, a first insulating layer that is provided on side faces of the semiconductor substrate and has concavities formed through and on side faces of the first insulating layer, and first metal layers that are provided in center portions of inner side faces of the concavities; and
second metal layers that are provided in the concavities and are connected to the first metal layers formed on the at least one of the semiconductor chips.
2. The semiconductor device as claimed in claim 1 , wherein the first insulating layer is provided on an upper face of the semiconductor substrate.
3. The semiconductor device as claimed in claim 2 , wherein:
the first metal layers are provided on an upper face of the first insulating layer; and
the semiconductor device further comprises a second insulating layer that is formed on upper faces of the first metal layers.
4. The semiconductor device as claimed in claim 1 , wherein:
the at least one of the semiconductor chips includes pad electrodes that are provided on the semiconductor substrate;
the first insulating layer has openings that are formed over the pad electrodes; and
the first metal layers are also provided on an upper face of the first insulating layer, and are connected to the pad electrodes through the openings.
5. A semiconductor device comprising
a package that has a built-in semiconductor device mounted therein, the built-in semiconductor device being the semiconductor device as claimed in any of claim 1 .
6. The semiconductor device as claimed in claim 5 , wherein:
the package has a substrate; and
the built-in semiconductor device is face-down mounted on the substrate.
7. The semiconductor device as claimed in claim 5 , wherein:
the package has a lead frame; and
the built-in semiconductor device is sealed with resin.
8. A semiconductor device comprising:
a plurality of stacked semiconductor chips, at least one of the semiconductor chips including a semiconductor substrate, a first insulating layer that is provided on side faces and an upper face of the semiconductor substrate, first metal layers that are provided on side faces and an upper face of the first insulating layer, and a second insulating layer that is provided on upper faces of the first metal layers and side faces of the first insulating layer and the first insulating layer has concavities formed through and on the side faces thereof, and
second metal layers that are provided in the concavities and are connected to the first metal layers formed on the at least one of the semiconductor chips, the second metal layers being connected to the first metal layers through the concavities.