CdTe system compound semiconductor single crystal
View Patent ↗It is to define the resistivity and the contained amount of impurities of a CdTe system compound semiconductor single crystal and to provide a CdTe system compound semiconductor single crystal which is useful as a substrate for optical devices such as an infrared sensor and the like. In a CdTe system compound semiconductor single crystal for an optical device, a Group 1 (1A) element is included in a range of 5×10 14 to 6×10 15 cm −3 in the crystal, a total amount of a Group 13 (3B) element and a Group 17 (7B) element included in the crystal is less than 2×10 15 cm −3 and less than a total amount of the Group 1 (1A) element, and resistivity of the crystal is in a range of 10 to 104 Ωcm.
1. A CdTe system compound semiconductor single crystal for an optical device, wherein
a Group 1 (1A) element is included in a range of 5×10 14 to 6×10 15 cm −3 in the crystal,
a total amount of a Group 13 (3B) element and a Group 17 (7B) element included in the crystal is less than 2×10 15 cm −3 and less than a total amount of the Group 1 (1A) element, and
resistivity of the crystal is in a range of 10 to 10 4 Ωcm.
2. The CdTe system compound semiconductor single crystal as claimed in claim 1 , wherein
a Group 14 (4B) element and a transition metal element are further included in the crystal, and
a total amount of the Group 13 (3B) element, the Group 17 (7B) element, Ge and Sn which are the Group 14 (4B) elements, and Ti, V, Cr, Mn, Fe, Co, and Ni which are the transition metal elements included in the crystal is less than 2×10 15 cm −3 and less than the total amount of the Group 1 (1A) element.