Compact coils for high performance filters
A coil structure for a filter device includes a first metallization deposited over a substrate and oriented in a first coil. The first coil extends horizontally across the substrate while maintaining a substantially flat vertical profile. A second metallization is deposited over the substrate and oriented in a second coil. The second coil is magnetically coupled to the first coil. A portion of the second coil is oriented interiorly of the first coil. A third metallization is deposited over the substrate and oriented in a third coil. The third coil is magnetically coupled to the first and second coils. A portion of the third coil is oriented interiorly of the second coil.
1. An inductor for a semiconductor device, comprising:
a first metallization deposited over a substrate and oriented in a first coil, the first coil extending horizontally across the substrate while maintaining a substantially flat vertical profile;
a second metallization deposited over the substrate and oriented in a second coil, the second coil magnetically coupled to the first coil, wherein a portion of the second coil is oriented interiorly of the first coil; and
a third metallization deposited over the substrate and oriented in a third coil, the third coil magnetically coupled to the first and second coils, wherein a portion of the third coil is oriented interiorly of the second coil, wherein each of the first, second, and third coils is coupled to ground at a first end.
2. The inductor of claim 1 , wherein the substrate includes a silicon, glass, or ceramic substrate for structural support.
3. The inductor of claim 2 , wherein the coil structure comprises a portion of a semiconductor device.
4. The inductor of claim 1 , wherein the first tube has a rectangular or round cross-section.
5. The inductor of claim 1 , further including a capacitor device deposited over the substrate and coupled to each of the first, second, and third coils at a second end.
6. The inductor of claim 1 , wherein the second end of the first coil is oriented at a degree of angle between the second end of the second coil.
7. A method of manufacturing an inductor, comprising:
providing a first metallization deposited over a substrate and oriented in a first coil, the first coil extending horizontally across the substrate while maintaining a substantially flat vertical profile;
providing a second metallization deposited over the substrate and oriented in a second coil, the second coil magnetically coupled to the first coil, wherein a portion of the second coil is oriented interiorly of the first coil; and
providing a third metallization deposited over the substrate and oriented in a third coil, the third coil magnetically coupled to the first and second coils, wherein a portion of the third coil is oriented interiorly of the second coil, wherein each of the first, second, and third coils is coupled to ground at a first end.
8. The method of manufacture of claim 7 , wherein the substrate includes a silicon, glass, or ceramic substrate for structural support.
9. The method of manufacture of claim 8 , wherein the coil structure comprises a portion of a semiconductor device.
10. The method of manufacture of claim 7 , wherein the first tube has a rectangular or round cross-section.
11. The method of manufacture of claim 7 , further including providing a capacitor device deposited over the substrate and coupled to each of the first, second, and third coils at a second end.
12. The method of manufacture of claim 7 , wherein the second end of the first coil is oriented at a degree of angle between a second end of the second coil.