Methods of forming silicides of different thicknesses on different structures
View Patent ↗The gate and active regions of a device are formed and alternating steps of applying and removing nitride and oxide layers allows exposing silicon in different areas while keeping silicon or polysilicon in other area covered with nitride. Metal layers are deposited over the exposed silicon or polysilicon and annealing forms a silicide layer in the selected exposed areas. The oxide and/or nitride layers are removed from the covered areas and another metal layer is deposited. The anneal process is repeated with silicide of one thickness formed over the second exposed areas with additional thickness of silicide formed over the previous silicide thickness.
1. A method of forming silicides of different thickness on different materials of a device comprising the steps of:
forming a first region of first silicon and a second region of second silicon;
covering the first region with a diffusion blocking layer while exposing the second region;
depositing a first metal layer over the first and second regions;
annealing the device a first time, thereby forming a silicide of a first thickness by reacting the first metal layer and the exposed second silicon of the second region;
removing the blocking layer and un-reacted first metal from the first region;
depositing a second metal layer over the first region and the first thickness of silicide of the second region; and
annealing the device a second time, thereby forming a silicide of a second thickness by reacting the second metal layer and the exposed silicon of the first region and forming a silicide of a third thickness by reacting the second metal layer and the first thickness of silicide of the second layer;
wherein the first thickness, the second thickness, and the third thickness are each different with respect to one another.
2. The method of claim 1 , wherein the device is a field effect transistor (FET) of an integrated circuit (IC) wafer.
3. The method of claim 1 , wherein the device is a passive resistor device.
4. The method of claim 2 , wherein the first and third silicide thicknesses form contact areas for connecting the device to other circuitry on the IC.
5. A method of forming silicides of different thickness on different materials of a device comprising the steps of:
forming a first region of first silicon and a second region of second silicon;
covering the first region with a diffusion blocking layer while exposing the second region;
depositing a first metal layer over the first and second regions;
annealing the device a first time, thereby forming a silicide of a first thickness by reacting the first metal layer and the exposed second silicon of the second region;
removing the blocking layer and un-reacted first metal from the first region;
depositing a second metal layer over the first region and the first thickness of silicide of the second region; and
annealing the device a second time, thereby forming a silicide of a second thickness by reacting the second metal layer and the exposed silicon of the first region and forming a silicide of a third thickness by reacting the second metal layer and the first thickness of silicide of the second layer;
wherein the device is a field effect transistor (FET) of an integrated circuit (IC) wafer;
wherein the first region comprises the active regions of the FET device.
6. The method of claim 5 , wherein the first region comprises the drain and source of the FET device.
7. The method of claim 5 , wherein the second region comprises the gate of the FET device.
8. A method of forming silicides of different thickness on different materials of a device comprising the steps of:
forming a first region of first silicon and a second region of second silicon;
covering the first region with a diffusion blocking layer while exposing the second region;
depositing a first metal layer over the first and second regions;
annealing the device a first time, thereby forming a silicide of a first thickness by reacting the first metal layer and the exposed second silicon of the second region;
removing the blocking layer and un-reacted first metal from the first region;
depositing a second metal layer over the first region and the first thickness of silicide of the second region; and
annealing the device a second time, thereby forming a silicide of a second thickness by reacting the second metal layer and the exposed silicon of the first region and forming a silicide of a third thickness by reacting the second metal layer and the first thickness of silicide of the second layer;
wherein the device is a passive resistor device;
wherein the first region comprises the body of the resistor.
9. The method of claim 8 , wherein the second region(s) comprises the contacts ends of the resistor device.
10. A method of forming silicides of different metals on different areas of a device comprising the steps of:
forming a first region of first silicon and a second region of second silicon; covering the first region with a diffusion blocking layer while exposing the second region;
depositing a layer of first metal over the first and second regions;
annealing the device a first time, thereby forming a first silicide by reacting the first metal and the exposed second silicon of the second region;
removing the blocking layer and un-reacted first metal from the first region;
masking the first silicide formed in the second region;
depositing a layer of second metal over the first region and the masked first silicide of the second region; and
annealing the device a second time, thereby forming a second silicide by reacting the second metal and the exposed silicon of the first region;
wherein the device is a field effect transistor (FET) of an integrated circuit (IC) wafer;
wherein the first region comprises the active regions of the FET device.
11. The method of claim 10 , wherein the first region comprises the drain and source of the FET device.
12. The method of claim 10 , wherein the second region comprises the gate of the FET device.
13. The method of claim 10 , wherein the first and second silicides form contact areas for connecting the device to other circuitry on the IC.
14. A method of forming silicides of different metals on different areas of a device comprising the steps of:
forming a first region of first silicon and a second region of second silicon; covering the first region with a diffusion blocking layer while exposing the second region;
depositing a layer of first metal over the first and second regions;
annealing the device a first time, thereby forming a first silicide by reacting the first metal and the exposed second silicon of the second region;
removing the blocking layer and un-reacted first metal from the first region;
masking the first silicide formed in the second region;
depositing a layer of second metal over the first region and the masked first silicide of the second region; and
annealing the device a second time, thereby forming a second silicide by reacting the second metal and the exposed silicon of the first region;
wherein the device is a passive resistor device;
wherein the first region comprises the body of the resistor.
15. The method of claim 14 , wherein the second region(s) comprises the contacts ends of the resistor device.