Normally-off integrated JFET power switches in wide bandgap semiconductors and methods of making

1. A method comprising:

positioning a first mask on a layer of n-type semiconductor material, wherein the layer of n-type semiconductor material is on a first layer of p-type semiconductor material and the first layer of p-type semiconductor material is on a substrate;

selectively etching the layer of n-type semiconductor material through openings in the first mask to form an etched region and a raised region having a sidewall adjacent the etched region;

removing the first mask;

positioning a second mask on the layer of n-type semiconductor material which masks a portion of the etched region and a portion of the raised region;

implanting n-type dopants in the layer of n-type semiconductor material through openings in the mask to form a first non-implanted region over the etched region, a second non-implanted region over the raised region and n-type implanted regions in the layer of n-type semiconductor material;

removing the second mask;

epitaxially growing a second layer of p-type semiconductor material on the etched and implanted layer of n-type semiconductor material;

positioning a third mask on the second layer of p-type semiconductor material which masks a portion of the second layer of p-type semiconductor material over the first non-implanted region and a portion of the second layer of p-type semiconductor material over the second non-implanted region;

using the third mask, selectively etching through the second layer of p-type semiconductor material to expose implanted regions in the underlying layer of n-type semiconductor material thereby forming raised features of p-type semiconductor material;

removing the third mask; and

forming ohmic contacts on the raised features and on the implanted regions in the layer of n-type semiconductor material.

2. The method of claim 1 , wherein the n-type implanted regions have a dopant concentration of 5×10 18 cm −3 or greater and a thickness of 0.1 μm or greater.

3. The method of claim 1 , wherein the substrate is a semi-insulating substrate.

4. The method of claim 1 , wherein the layer of n-type semiconductor material has a thickness of 0.2 to 1.5 μm and a dopant concentration, prior to implantation, of 5×10 15 to 2×10 17 cm −3 .

5. The method of claim 1 , wherein the second layer of p-type semiconductor material is epitaxially grown to a thickness of 0.2 to 1.5 μm and has a doping concentration greater than 5×10 18 cm −3 .

6. The method of claim 1 , wherein the first layer of p-type semiconductor material has a thickness of 0.1 μm or greater and a dopant concentration of 1×10 15 to 1×10 17 cm −3 .

7. A method comprising:

positioning a first mask on a first layer of n-type semiconductor material, wherein the first layer of n-type semiconductor material is on a layer of p-type semiconductor material and the layer of p-type semiconductor material is on a substrate;

selectively etching the first layer of n-type semiconductor material through openings in the first mask to form an etched region and a raised region;

removing the first mask;

epitaxially growing a second layer of n-type semiconductor material on the etched and implanted layer of n-type semiconductor material;

positioning a second mask on the second layer of n-type semiconductor material such that openings in the second mask are located over the etched region of the layer of n-type semiconductor material and over the raised region of the layer of n-type semiconductor material;

using the second mask, selectively etching through the second layer of n-type semiconductor material to expose the underlying first layer of n-type semiconductor material and to form raised features of n-type semiconductor material;

selectively implanting p-type dopants in the first layer of n-type semiconductor material through the openings in the second mask to form p-type implanted regions;

removing the second mask; and

forming ohmic contacts on exposed surfaces of the raised features of n-type semiconductor material and the p-type implanted regions.

8. The method of claim 7 , wherein the second layer of n-type semiconductor material is more heavily doped that the first layer of n-type semiconductor material.

9. The method of claim 7 , wherein the second layer of n-type semiconductor material has a thickness of 0.2 to 1.5 μm and a dopant concentration greater than 5×10 18 cm −3 .

10. The method of claim 7 , wherein the first layer of n-type semiconductor material has a thickness of 0.3 to 1.5 μm and a dopant concentration of 5×10 15 to 2×10 17 cm −3 .

11. The method of claim 7 , wherein the p-type implanted regions have a thickness of 0.1 μm or greater and a dopant concentration greater than 5×10 18 cm −3 .

12. A method comprising:

positioning a first mask on a first layer of n-type semiconductor material, wherein the first layer is on a second layer of n-type semiconductor material and the second layer is on a substrate;

using the first mask, selectively implanting p-type dopants in the first layer to form a p-type implanted region adjacent a non-implanted region in the first layer;

removing the first mask;

epitaxially growing a third layer of n-type semiconductor material on the first layer;

epitaxially growing a fourth layer of n-type semiconductor type material on the third layer;

positioning a second mask on the fourth layer;

selectively etching through the fourth layer to expose underlying third layer through openings in the second mask thereby forming raised features of n-type semiconductor material over the p-type implanted region of the first layer and one or more raised features of n-type semiconductor material over the non-implanted region of the first layer;

implanting p-type dopants in the third layer through openings in the second mask to form p-type implanted regions in the third layer between and adjacent the raised features of n-type semiconductor material;

removing the second mask;

positioning a third mask which masks the raised features and the area between the raised features over the p-type implanted region of the first layer and which masks the one or more raised features over the non-implanted region of the first layer and areas adjacent thereto;

using the third mask, selectively etching through the third layer to expose p-type implanted and non-implanted regions of the underlying first layer thereby forming first and second raised structures, wherein the first raised structure comprises the raised features over the p-type implanted region of the first layer and the p-type implanted region of the third layer therebetween and wherein the second raised structure comprises the one or more raised features over the non-implanted region of the first layer and p-type implanted regions of the third layer adjacent thereto;

removing the third mask;

positioning a fourth mask covering the first and second raised structures and a region of p-type implanted first layer adjacent the first raised structure;

using the fourth mask, selectively etching through the p-type implanted region in the first layer of n-type semiconductor material adjacent to and between the first and second raised structures;

removing the fourth mask

forming ohmic contacts on exposed surfaces of the raised features of n-type semiconductor material and on exposed p-type implanted regions.

13. The method of claim 12 , wherein the second layer of n-type semiconductor material is more heavily doped that the first layer of n-type semiconductor material.

14. The method of claim 12 , wherein the second layer of n-type semiconductor material has a dopant concentration greater than 5×10 18 cm −3 and a thickness of 0.5 to 1 μm.

15. The method of claim 12 , wherein the first layer of n-type semiconductor material has a dopant concentration of 2×10 14 to 2×10 16 cm −3 and a thickness of 5 to 350 μm.

16. The method of claim 12 , wherein the p-type implanted region in the first layer has a thickness of 0.1 μm or greater and a dopant concentration or 5×10 18 cm −3 or greater.

17. The method of claim 12 , wherein the p-type implanted regions in the third layer have a thickness of 0.1 μm or greater and a dopant concentration or 5×10 18 cm −3 or greater.

18. The method of claim 12 , wherein the third layer of n-type semiconductor material has a dopant concentration of 5×10 15 to 5×10 17 cm −3 and a thickness of 0.2 to 1.5 μm.

19. The method of claim 12 , wherein the fourth layer of n-type semiconductor material has a dopant concentration greater than 5×10 18 cm −3 and a thickness of 0.2 to 1.5 μm.

20. The method of claim 12 , wherein the n-type substrate has a dopant concentration greater than 1×10 18 cm −3 .

21. A method comprising:

positioning a first mask on a first layer of n-type semiconductor material, wherein the first layer is on a second layer of n-type semiconductor material and the second layer is on a substrate;

using the first mask, selectively implanting p-type dopants in the first layer of n-type semiconductor material to form a p-type implanted region adjacent a non-implanted region in the first layer;

removing the first mask;

epitaxially growing a third layer of n-type semiconductor material on the first layer;

epitaxially growing a fourth layer of n-type semiconductor type material on the third layer;

positioning a second mask on the fourth layer;

selectively etching through the fourth layer to expose underlying third layer through openings in the second mask thereby forming raised features of n-type semiconductor material over the p-type implanted region of the first layer and one or more raised features of n-type semiconductor material over the non-implanted region of the first layer;

removing the second mask;

positioning a third mask which masks the raised features and the area between the raised features over the p-type implanted region of the first layer and which masks the raised feature over the non-implanted region of the first layer;

using the third mask, selectively etching through the third layer to expose p-type implanted and non-implanted regions of the underlying first layer thereby forming first and second raised structures, the first raised structure comprising the raised features over the p-type implanted region of the first layer and the region of the third layer therebetween and the second raised structure comprising the raised feature over the non-implanted region of the first layer, the second raised structure having sidewalls;

removing the third mask;

forming ohmic contacts on exposed surfaces of the raised features of n-type semiconductor material and on the exposed p-type implanted region of the first layer; and

forming Schottky contacts on the third layer between the raised features over the p-type implanted region, on the non-implanted portion of the first layer adjacent the second raised structure and on material of the third layer on the sidewalls of the second raised structure.

22. The method of claim 21 , wherein the second layer of n-type semiconductor material is more heavily doped that the first layer of n-type semiconductor material.

23. The method of claim 21 , wherein the second layer of n-type semiconductor material has a dopant concentration greater than 5×10 18 cm −3 and a thickness of 0.5 to 1 μm.

24. The method of claim 21 , wherein the first layer of n-type semiconductor material has a dopant concentration of 2×10 14 to 2×10 16 cm −3 and a thickness of 5 to 350 μm.

25. The method of claim 21 , wherein the p-type implanted region in the first layer has a thickness of 0.1 μm or greater and a dopant concentration or 5×10 18 cm −3 or greater.

26. The method of claim 21 , wherein the third layer of n-type semiconductor material has a dopant concentration of 5×10 15 to 5×10 17 cm −3 and a thickness of 0.2 to 1.5 μm.

27. The method of claim 21 , wherein the fourth layer of n-type semiconductor material has a dopant concentration greater than 5×10 18 cm −3 and a thickness of 0.2 to 1.5 μm.

28. The method of claim 21 , wherein the n-type substrate has a dopant concentration greater than 1×10 18 cm −3 .