IP Library Granted Patent US 7,892,894
Granted Patent B2
US 7,892,894 · App. 11/858,554 · Granted Feb 22, 2011

Method of manufacturing integrated circuit package system with warp-free chip

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Quick Facts
Patent No.
US 7,892,894
App. No.
11/858,554
Granted
Feb 22, 2011
Kind
B2
Abstract

An integrated circuit package system includes: providing an integrated circuit wafer having an active side and a backside; forming a stress-relieving layer on the backside; forming an adhesion layer on the stress-relieving layer; dicing the integrated circuit wafer into a semiconductor chip with the stress-relieving layer and the adhesion layer on the backside of the semiconductor chip; and mounting the semiconductor chip over electrical interconnects.

Claims (39)

1. A method of manufacturing an integrated circuit package system comprising:

providing an integrated circuit wafer having a backside;

forming a stress-relieving layer on the backside of the integrated circuit wafer;

forming an adhesion layer on the stress-relieving layer;

dicing the integrated circuit wafer into a semiconductor chip with the stress-relieving layer and the adhesion layer over the backside of the semiconductor chip; and

mounting the semiconductor chip including the stress-relieving layer on the backside and the adhesion layer on electrical interconnects.

2. The method as claimed in claim 1 wherein:

forming the adhesion layer forms the adhesion layer on selected regions of the stress-relieving layer;

dicing the integrated circuit wafer leaves portions of the adhesion layer only adjacent the diced sides of the semiconductor chip; and

mounting the semiconductor chip mounts the portions of the adhesion layer on the electrical interconnects.

3. The method as claimed in claim 1 wherein:

forming the adhesion layer forms the adhesion layer thicker than the stress-relieving layer; and

mounting the semiconductor chip mounts the adhesion layer on the electrical interconnects and over the sides thereof.

4. The method as claimed in claim 1 further comprising:

forming an additional stress-relieving layer on the adhesion layer; and

mounting the semiconductor chip mounts the additional stress-relieving layer on the electrical interconnects.

5. The method as claimed in claim 1 further comprising:

electrically connecting the semiconductor chip to the electrical interconnects with bond wires; and

encapsulating the semiconductor chip, the bond wires, and the electrical interconnects with portions of the electrical interconnects exposed.

6. A method of manufacturing an integrated circuit package system comprising:

providing an integrated circuit wafer having an active side and a backside;

forming a low modulus stress-relieving layer on the backside of the integrated circuit wafer;

forming a high modulus adhesion layer on the low modulus stress-relieving layer;

fully or partially curing the low modulus stress-relieving layer or the high modulus adhesion layer;

dicing the integrated circuit wafer into a semiconductor chip with the low modulus stress-relieving layer and the high modulus adhesion layer over the backside of the semiconductor chip; and

mounting the semiconductor chip including the low modulus stress-relieving layer on the backside and the high modulus adhesion layer on leadfingers.

7. The method as claimed in claim 6 wherein:

forming the high modulus adhesion layer forms the high modulus adhesion layer on selected regions of the low modulus stress-relieving layer;

dicing the integrated circuit wafer leaves portions of the high modulus adhesion layer only adjacent the diced sides of the semiconductor chip; and

mounting the semiconductor chip mounts the portions of the high modulus adhesion layer on the leadfingers.

8. The method as claimed in claim 6 wherein:

forming the high modulus adhesion layer forms the high modulus adhesion layer thicker than the low modulus stress-relieving layer; and

mounting the semiconductor chip mounts the high modulus adhesion layer on the leadfingers and bonded to the sides thereof.

9. The method as claimed in claim 6 further comprising:

forming an additional low modulus stress-relieving layer on the high modulus adhesion layer; and

mounting the semiconductor chip mounts the additional low modulus stress-relieving layer on the leadfingers.

10. The method as claimed in claim 6 further comprising:

electrically connecting the semiconductor chip to the leadfingers with bond wires; and

encapsulating the semiconductor chip, the bond wires, and the leadfingers with portions of the leadfingers exposed.

Assignments (7)
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE'S NAME ON COVER SHEET FROM STATS CHIPPAC PTE. LTE. TO STATS CHIPPAC PTE. LTD. PREVIOUSLY RECORDED ON REEL 064783 FRAME 0896. ASSIGNOR(S) HEREBY CONFIRMS THE CORRECTIVE CHANGE OF NAME. Recorded Sep 22, 2023
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTD.
Reel/Frame 065015/0917 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE'S NAME ON COVERSHEET FROM STATS CHIPPAC PTE. LTE. TO STATS CHIPPAC PTE. LTD. PREVIOUSLY RECORDED ON REEL 038378 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE CHANGE OF NAME. Recorded Sep 14, 2023
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTD.
Reel/Frame 064962/0123 →
CORRECT ERROR IN ASSIGNMENT NAME FROM STATS CHIPPAC PTE. LTE. TO STATS CHIPPAC PTE. LTD. (REEL: 038378 FRAME: 0292) Recorded Aug 30, 2023
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE.LTE.
Reel/Frame 064783/0896 →
RELEASE OF SECURITY INTEREST Recorded Jun 12, 2020
From: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
To: STATS CHIPPAC, INC.; STATS CHIPPAC PTE. LTD. FORMERLY KNOWN AS STATS CHIPPAC LTD.
Reel/Frame 052924/0007 →
CHANGE OF NAME Recorded Apr 7, 2016
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTE.
Reel/Frame 038378/0292 →
SECURITY INTEREST Recorded Aug 6, 2015
From: STATS CHIPPAC, INC.; STATS CHIPPAC LTD.
To: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
Reel/Frame 036288/0748 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 20, 2007
From: DO, BYUNG TAI; SHIM, IL KWON; DIMAANO, ANTONIO B., JR.; KUAN, HEAP HOE
To: STATS CHIPPAC LTD.
Reel/Frame 019855/0762 →