Method of cleaning substrates utilizing megasonic energy
View Patent ↗A method of cleaning a substrate without causing damage to the substrate is provided. The method comprises the steps of providing a transmitter made of a material that is a good conductor of megasonic energy, positioning the transmitter so that a lower edge is positioned spaced from but closely adjacent to a substantially flat surface of the substrate so that when liquid is applied to the edge and the substrate, a meniscus of liquid is formed between the edge and the substrate, providing a transducer for producing megasonic vibration, coupling the transducer to the transmitter so that a transmission path is created to transmit the megasonic vibration into the transmitter, and creating a barrier in the transmission path so that the liquid vibration is attenuated directly beneath the lower edge of the transmitter.
1. A method of cleaning a substrate comprising the steps of:
providing a transmitter made of a material that is a good conductor of megasonic energy;
positioning the transmitter so that a lower edge is positioned spaced from but closely adjacent to a substantially flat surface of the substrate so that when liquid is applied to the edge and the substrate, a meniscus of liquid is formed between the edge and the substrate;
providing a transducer for producing megasonic vibration;
coupling the transducer to the transmitter so that a transmission path is created to transmit the megasonic vibration into the transmitter; and
creating a barrier in the transmission path so that the liquid vibration is attenuated directly beneath the probe lower edge by forming a recess in a rear face of the transmitter, with the recess being axially aligned with said transmitter lower edge.
2. A method of cleaning a substrate comprising the steps of:
providing a transmitter made of a material that is a good conductor of megasonic energy;
positioning the transmitter so that a lower edge is positioned spaced from but closely adjacent to a substantially flat surface of the substrate so that when liquid is applied to the edge and the substrate, a meniscus of liquid is formed between the edge and the substrate;
providing a transducer for producing megasonic vibration;
coupling the transducer to the transmitter so that a transmission path is created to transmit the megasonic vibration into the transmitter;
positioning a separate element in said transmission path; and
creating a barrier in the transmission path so that the liquid vibration is attenuated directly beneath the probe lower edge, said barrier is formed by creating a gap in said separate element.
3. A method of cleaning a substrate comprising the steps of:
providing a transmitter made of a material that is a good conductor of megasonic energy;
positioning the transmitter so that a lower edge is positioned spaced from but closely adjacent to a substantially flat surface of the substrate so that when liquid is applied to the edge and the substrate, a meniscus of liquid is formed between the edge and the substrate;
providing a transducer for producing megasonic vibration;
coupling the transducer to the transmitter so that a transmission path is created to transmit the megasonic vibration into the transmitter;
positioning a heat transfer element to form part of said transmission paths;
creating a barrier in the transmission path so that the liquid vibration is attenuated directly beneath the probe lower edge, the barrier created by configuring the heat transfer element; and
conducting heat transfer fluid in heat transfer relation with said heat transfer element to conduct heal away from said transducer.