Methods and apparatus for rotationally accessed tester interface
View Patent ↗A wafer/wafer translator pair in the attached state, with the wafer translator extending beyond the outer circumference of the wafer, is disposed on a rotation stage. At least one surface of the edge-extended wafer translator, in a peripheral annular region, provides contact pads electrically coupled to corresponding pads on the wafer, and a caliper-style contact block, operable to move perpendicularly the edge-extended wafer translator is positioned such the contact pads of the annular region may be electrically engaged with the contact block. After electrical communication between the wafer and the contact block, the contact block moves to a disengagement position, the rotation stage rotates the wafer/wafer translator pair to a new position and the contact block may then move into engagement with different contact pads in the annular region.
1. A rotationally accessed tester interface, comprising:
a rotation stage;
an edge-extended wafer translator, having a first and a second major surface, disposed on the rotation stage; and
a first contact block having a first portion positioned to overlap a peripheral annular region on a first major surface of the edge-extended wafer translator, and moveable, independent of the edge-extended wafer translator, in an axis perpendicular to the first major surface;
wherein the edge-extended wafer translator includes contact pads disposed in a peripheral annular region of at least the first surface;
wherein the first contact block includes a zero insertion force socket operable to receive pins extending perpendicularly from the first major surface of the edge-extended wafer translator.
2. The rotationally accessed tester interface of claim 1 , wherein the edge-extended wafer translator is planar.
3. The rotationally accessed tester interface of claim 1 , wherein the edge-extended wafer translator is non-planar in the peripheral annular region thereof.
4. The rotationally accessed tester interface of claim 1 , wherein the first contact block includes pins extending outwardly from the first portion thereof toward the first major surface of the edge-extended wafer translator.
5. The rotationally accessed tester interface of claim 1 , wherein the first contact block includes a second portion positioned to overlap a peripheral annular region on a second major surface of the edge-extended wafer translator, and operable to move in an axis perpendicular to the second major surface; wherein the first contact block further comprises pins extending outwardly from the second portion thereof toward the second major surface of the edge-extended wafer translator; and wherein the edge-extended wafer translator includes contact pads disposed in the peripheral annular region of the second major surface.
6. The rotationally accessed tester interface of claim 1 , wherein the first contact block is coupled to one or more cables for electrical communication with at least one test apparatus.
7. The rotationally accessed tester interface of claim 1 , further includes a second contact block having a first portion positioned to overlap the peripheral annular region on the first major surface of the edge-extended wafer translator, and operable to move in an axis perpendicular to the first major surface.
8. A method of electrically accessing one or more integrated circuits on a wafer, comprising:
providing an edge-extended wafer translator, the edge-extended wafer translator having a first major surface and a second major surface;
removably attaching the wafer to the first major surface of the edge-extended wafer translator, thereby forming a wafer/wafer translator pair, wherein the edge-extended wafer translator provides electrical pathways from the integrated circuits on the wafer to contact terminals on a peripheral annular region of the edge-extended wafer translator;
providing a stage upon which the wafer/wafer translator pair is disposed; and
moving a first contact block toward the edge-extended wafer translator in an axis perpendicular to the first major surface of the edge-extended wafer translator such that an electrical connection is established between the first contact block and the contact terminals on the peripheral annular region of the edge-extended wafer translator;
wherein the first contact block includes a zero insertion force socket operable to receive pins extending perpendicularly from the first major surface of the edge-extended wafer translator.
9. The method of claim 8 , further comprising:
moving the first contact block away from the edge-extended wafer translator in the axis perpendicular to the first major surface of the edge-extended wafer translator; and
rotating the wafer/wafer translator pair.
10. The method of claim 8 , further comprising:
moving the first contact block away from the edge-extended wafer translator in the axis perpendicular to the first major surface of the edge-extended wafer translator; and
moving the first contact block in a path corresponding to the periphery of the edge-extended wafer translator.
11. The method of claim 10 , wherein the path is substantially circular.
12. A rotationally accessed tester interface, comprising:
a rotation stage;
an edge-extended wafer translator, having a first and a second major surface, disposed on the rotation stage; and
a first contact block having a first portion positioned to overlap a peripheral annular region on a first major surface of the edge-extended wafer translator, and moveable, independent of the edge-extended wafer translator, in an axis perpendicular to the first major surface;
wherein the edge-extended wafer translator includes contact pads disposed in a peripheral annular region of at least the first surface;
wherein the first contact block includes a low insertion force socket operable to receive pins extending perpendicularly from the first major surface of the edge-extended wafer translator.
13. The rotationally accessed tester interface of claim 12 , wherein the edge-extended wafer translator is planar.
14. The rotationally accessed tester interface of claim 12 , wherein the first contact block includes pins extending outwardly from the first portion thereof toward the first major surface of the edge-extended wafer translator.
15. The rotationally accessed tester interface of claim 12 , wherein the first contact block is coupled to one or more cables for electrical communication with at least one test apparatus.