A light emitting device, a wafer for making the same, and method for fabricating the same are disclosed. The device and wafer include a first layer of a first conductivity type, an active layer, and a layer of a second conductivity type. The active layer overlies the first layer, the active layer generating light. The second layer overlies the active layer, the second layer having a first surface in contact adjacent to the active layer and a second surface having a surface that includes features that scatter light striking the second surface. A layer of transparent electrically conducting material is adjacent to the second surface and covered by a first layer of a dielectric material that is transparent to the light generated by the active layer. A mirror layer that has a reflectivity greater than 90 percent is deposited on the first layer of dielectric material.
1. A device comprising:
a first layer comprising a material of a first conductivity type;
an active layer overlying said first layer, said active layer generating light when holes and electrons recombine therein;
a second layer comprising a material of a second conductivity type, said second layer having a first surface overlying said active layer and a second surface opposite to said first surface comprising features that scatter light striking said second surface;
a layer of transparent electrically conducting material overlying said second surface;
a first layer of dielectric material that is transparent to said light generated by said active layer overlying said layer of transparent electrically conducting material and having a first dielectric surface in contact with said layer of transparent electrically conducting material and a second dielectric surface opposite to said first dielectric surface;
a mirror layer overlying said first layer of dielectric material, and in direct contact with said second dielectric surface;
a second layer of dielectric material overlying said mirror layer, said mirror layer being encapsulated by said first and second layers of dielectric material;
wherein said second dielectric surface is sufficiently smooth to ensure that said mirror layer has a reflectivity greater than 90 percent.
2. The device of claim 1 wherein said first layer of dielectric comprises spin-on glass.
3. The device of claim 1 wherein said transparent electrically conducting material comprises indium tin oxide.
4. The device of claim 1 wherein said first layer, said second layer, and said active layer comprise materials from the GaN family of materials.
5. A device comprising:
a first layer comprising a material of a first conductivity type;
an active layer overlying said first layer, said active layer generating light when holes and electrons recombine therein;
a second layer comprising a material of a second conductivity type, said second layer having a first surface overlying said active layer and a second surface opposite to said first surface comprising features that scatter light striking said second surface;
a layer of transparent electrically conducting material overlying said second surface;
a first layer of dielectric material that is transparent to said light generated by said active layer overlying said layer of transparent electrically conducting material and having a first dielectric surface in contact with said layer of transparent electrically conducting material and a second dielectric surface opposite to said first dielectric surface;
a mirror layer overlying said first layer of dielectric material, and in direct contact with said second dielectric surface; and
a contact layer overlying said mirror layer, said contact layer being connected to the other of said first layer and said second layer by an electrically conducting via,
wherein said second dielectric surface is sufficiently smooth to ensure that said mirror layer has a reflectivity of greater than 90 percent and
wherein said electrically conducting via connecting said contact layer to the other of said first and second layers passes through an opening in said mirror layer.
6. The device of claim 5 , wherein said device comprises a top surface and a bottom surface, light generated in said active layer being emitted from said bottom surface, and wherein said top surface includes a first electrically conducting structure electrically connected to said mirror layer.
7. The device of claim 6 wherein said mirror layer and said contact layer are separated by a second layer of dielectric.
8. The device of claim 7 wherein said contact layer underlies a third layer of dielectric having a surface comprising said top surface.
9. The device of claim 6 wherein said top surface includes a second electrically conducting structure that is electrically connected to said contact layer; and wherein said first and second electrically conducting structures have outer surfaces that are coplanar and are adapted to being soldered to an external device.
10. The device of claim 6 wherein said top surface includes a second electrically conducting structure that is electrically connected to said contact layer; further comprising a heat conducting structure on said top surface, said heat-conducting structure having an outer surface that is coplanar with said first and second electrically conducting structures.