System of using offset gage for CMP polishing pad alignment and adjustment
View Patent ↗A method and system are provided using an offset dial gage for alignment and adjustment of a polishing pad that has been attached to a turntable of a chemical mechanical polishing (CMP) device. In a described embodiment, an offset dial gage has a surface that contacts a side of a turntable, while a sensor tip contacts the edge of a polishing pad positioned on the turntable. This provides an assessment of radial displacement of the polishing pad edge at this measurement point relative to the side of the turntable. Based on one or more such measurements, the polishing pad may be found acceptably positioned, may be trimmed, or may be replaced. The method and system reduce or eliminate the occurrence of a defect pattern found to be related to side unloading of semiconductor wafers from a CMP turntable.
1. A system for polishing semiconductor wafers comprising:
a. a semiconductor wafer polisher comprising a rotatable turntable, a polishing pad removably affixed to a first surface of the turntable, and a rotatable wafer ring adapted to hold a semiconductor wafer against the polishing pad during wafer polishing;
b. a polishing pad offset dial gage having a frame having a surface adapted for positioning against an outer peripheral edge of the turntable, a sensor pin having a free tip positioned to engage an outer peripheral edge of the polishing pad, and a data readout providing distance measurements as a function of radial displacement of the sensor pin tip from an initial position;
wherein measurement by the dial gage of the radial displacement between the polishing pad peripheral edge and the turntable peripheral edge provides information as to the acceptability of polishing pad placement prior to polishing semiconductor wafers.
2. The system of claim 1 wherein the offset dial gage additionally comprises a horizontal tab extending from the surface, the tab adapted to enter a horizontal slot along the edge of the turntable.
3. The system of claim 2 , additionally comprising a calibration block comprising a substantially planar face comprising a first position against which the sensor pin tip is positioned, the first position spaced a distance away from a recess adapted to receive the horizontal tab, the distance equal to a vertical distance between the polishing pad edge and the horizontal slot.
4. The system of claim 1 , wherein the dial gage is an offset dial gage that comprises a gage body having a data readout, a zero calibration control, a gage block having a measurement contact surface, a gage shaft ending with a gage tip adjustable to align with the measurement contact surface, and a horizontal tab that protrudes distally from the measurement contact surface.
5. The system of claim 1 , wherein the dial gage is an offset dial gage having a gage body.
6. The system of claim 5 , wherein the dial gage further include a data readout.
7. The system of claim 5 , wherein the dial gage further includes a zero calibration control.
8. The system of claim 5 , wherein the dial gage further includes a gage block having a measurement contact surface.
9. The system of claim 5 wherein the dial gage further includes a gage shaft ending with a gage tip adjustable to align with the measurement contact surface.
10. The system of claim 5 , wherein the dial gage further includes a horizontal tab that protrudes distally from the measurement contact surface.