Method for forming nitride crystals
View Patent ↗A method for growing a nitride crystal and a crystalline composition selected from one of AlN, InGaN, AlGaInN, InGaN, and AlGaNInN is provided. The composition comprises a true single crystal, grown from a single nucleus, at least 1 mm in diameter, free of lateral strain and tilt boundaries, with a dislocation density less than about 10 4 cm −2 .
1. A method for growing a nitride crystal which comprises:
providing source material containing less than 1 weight percent oxygen;
providing a mineralizer;
providing one or more seed crystals, wherein the seed crystal is larger than 1 mm in diameter;
providing a capsule;
filling the capsule with a nitrogen-containing solvent;
processing the capsule and contents in a supercritical fluid at a temperature higher than about 550° C. and a pressure higher than about 2 kbar.
2. The method of claim 1 , wherein the source material is Al x Ga 1-x-y In y N, wherein 0≦x, y, x+y≦1, and at least one of x or y is greater than zero.
3. The method of claim 1 , wherein the source material is Al x Ga 1-x-y In y N, wherein 0≦x, y, x+y≦1, and at least one of x or y is greater than 0.05.
4. The method of claim 1 wherein the source material is AlN.
5. The method of claim 1 wherein the mineralizer is at least one of (i) a nitride; (ii) an amide; (iii) a urea; (iv) an ammonium salt; (v) a halide, chalcogenide, or nitrate salt; (vi) an azide salt and (vii) a Li salt.
6. The method of claim 5 wherein the mineralizer is at least one compound formed by chemical reaction of at least two compounds selected from components (i)-(vii).
7. The method of claim 5 wherein the mineralizer is at least one compound formed by chemical reaction of at least one of compound selected from components (i)-(vii) with AlN and/or Al.
8. The method of claim 5 , wherein the mineralizer is at least one of HX, NH 4 X, and GaX 3 , wherein X is selected from the group consisting of F, Cl, Br, or I.
9. The method of claim 5 , wherein the mineralizer is a reaction product of at least one of HX, NH 4 X and GaX 3 with at least one of HX, NH 4 X, GaX 3 , Ga, GaN and NH 3 , wherein X is selected from the group consisting of F, Cl, Br, or I.
10. The method of claim 1 , wherein the mineralizer is at least one compound selected from the group consisting of Li 3 N, Mg 3 N 2 , Ca 3 N 2 , LiNH 2 , NaNH 2 , KNH 2 , NH 4 F, NH 4 Cl, NaCl, Li 2 S, KNO 3 , NaN 3 and Na 3 AlF 6 .
11. The method of claim 1 , wherein the optional seed crystal is an AlN seed crystal or a non-AlN seed crystal.
12. The method of claim 1 wherein the seed is selected from the group consisting of InN, AlN, GaN, Ga x In 1-x N, SiC, Ga x Al 1-x N, InAlN, Al y Ga 1-x-y In x N, ZnO, BN (Hexagonal), B x Ga 1-x N, B x Al 1-x N, B x In 1-x N, MgAl2O4, BP, (Ga x In 1-x ) 2 Se 3 , ScAlMgO4, YFeZnO4, MgO, Fe2NiO4, LiGa5O8, Na2MoO4, Na2WO4, In2CdO4, LiGaO2, Ca8La2(PO4)6O2 and sapphire.
13. The method of claim 1 wherein the nitrogen-containing solvent is ammonia.